background image

im Sinne folgender EU-Richtlinien:

pursuant to the following EU directives:

- Maschinen/

Machinery 

98/37/EG (Anhang/

Annex

IIA)

- Elektromagnetische Verträglichkeit/

Electromagnetic Compatibility

89/336/EWG

- Niederspannung/

Low Voltage

73/23/EWG

Hiermit erklären wir, dass das unten aufgeführte Produkt den Bestimmungen der 

EU-Maschinen-

richtlinie 98/37/EG

, der 

EU-Richtlinie über Elektromagnetische Verträglichkeit 89/336/EWG

und der 

EU-Niederspannungsrichtlinie 73/23/EWG

entspricht.

We hereby certify, that the product specified below is in accordance with the provision of 

EU Machinery

Directive 98/37/EEC, EU Electromagentic Compatibility Directive 89/336/EEC

and 

EU Low

Voltage Directive 73/23/EEC

.

Produkt

/Product:

TSH/TSU 071
TSH/TSU 261
TSH/TSU 521

Angewendete Richtlinien, harmonisierte Normen und angewendete nationale Normen:

Guidelines, harmonised standards, national standards which have been applied:

EN 292-1

EN 50 081-1

EN 292-2

EN 50 082-2

EN 294

IEC 801 1-4

EN 61 010

VDE 0843-6

EN 55 011

Unterschrift/

Signature:

Unterschriften:

(W. Dondorf)
Geschäftsführer

Managing Director

Pfeiffer Vacuum GmbH
Berliner Str. 43
35614 Asslar
Germany

Konformitätserklärung

Declaration of Conformity

Konf.I/2003

Summary of Contents for TSH 071

Page 1: ...Turbomolecular Drag Pumping Stations PT 0031 BE H 0408 TSH 071 TSU 071 TSH 261 TSU 261 TSH 521 TSU 521 Betriebsanleitung Operating Instructions...

Page 2: ...l Schema 7 Connection Involving Rotary Vane Vacuum Pumps 8 Connection Involving Diaphragm Pumps 9 4 Operations 10 4 1 Transportation Protection 10 42 Filling In The Lubricant 10 4 3 Operational Behavi...

Page 3: ...tomatically following an interruption to the mains power supply For this reason access to the vacuum chambers for example via doors flanges valves may only be opened once the pumping station has been...

Page 4: ...ry vane vacuum pump must be filled with operating fluid The operating fluid is contained in a pack inclu ded with the delivery consignment Before first time starting on pumping stations equipped with...

Page 5: ...operating fluid is included in the delivery consignment and must be filled into the pump before first time operating Diaphragm pumps do not require lubricant Permissible magnetic fields TSH 071 TSU 07...

Page 6: ...of accessories please refer to Section 3 7 Connections Plan 3 5 Connecting The Vacuum Unit There should be no unilateral loading on the high vacuum flange The weight of a vacuum chamber freely flange...

Page 7: ...MEASURANCE TERMINAL STRIP X1 3 TERMINAL STRIP TSHU 071 261 521 RS 485 REMOTE VENT FAN HEAT TMS FV PUMP X2 PM 051 409 X 13 14 1S2 1X2 PE PE TC 1E5 PM 051 101 T POT EQUALIZATION FRAME GROUNDING M 1 U V...

Page 8: ...CKING PUMP AS ROTARY VANE PUMP 21 X1 22 X1 A1 A2 1K1 12 21 14 1 2 1 2 12 21 14 1K1 1 4 K A 1 2 3 4 FV PUMP ws PM 051 409 X gn bn ge Z MAINS TURBO PE PE 18 OPTION 19 20 A1 A2 PE 1Y8 TVV 001 FORE VACUUM...

Page 9: ...X gn bn ge Z MAINS BACKING PUMP AS DIAPHRAGM PUMP 21 X1 22 X1 240VAC 5A SOLID STATE RELAY PE TURBO PE M 1 U V PE 1E8 FAN 17 15 X1 16 X1 M 1 U V PE 1M7 BACKING PUMP 18 1G5 POWER SUPPLY 20 19 A1 A2 PE 1...

Page 10: ...nt and type of operating fluid is shown on the rating plate Screw in operating fluid filler screw 8 and take care with the O ring Re secure the filling hose in the side panel Fit the side panel back o...

Page 11: ...itched off with the key 6 Pumpstand EIN AUS pumping station ON OFF Turbopump and vacuum chamber are vented via Venting Valve TVF 005 which opens for 0 3 seconds when the venting frequency does not att...

Page 12: ...right hand side Exert slight downward pressure on operating fluid duct 6 turn 90 and bring into the forward position Unscrew operating fluid drain screw 7 and drain operating fluid via operating flui...

Page 13: ...hich are contaminated microbiologically explosively or radioactively cannot be accepted as a matter of principle Fill out the declaration of contamination In every case the Declaration of Contaminatio...

Page 14: ...3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 Rotary Vane Pump DUO 2 5 m 3 h 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 UNO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 10 m 3 h 10 10 10 10 10 10 10 10...

Page 15: ...onnection Durchf hrung Me kabel Auspuff G1 2 Exhaust G1 2 Feedthrough Measurement cable Sperrgas Flutgas Sealing gas Venting gas Wasserk hlung Water cooling 3 150 145 275 96 Betriebsmittel abla rinne...

Page 16: ...ug PM 041 903 T PM 0542 BN 208 V UL plug PM 041 904 T 115 V UL plug PM 041 905 T TMH TMU 521 230 V Schuko plug PM 051 096 T PM 0542 BN 208 V UL plug PM 051 097 T 115 V UL plug PM 051 098 T Water cooli...

Page 17: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 18: ...the product specified below is in accordance with the provision of EU Machinery Directive 98 37 EEC EU Electromagentic Compatibility Directive 89 336 EEC and EU Low Voltage Directive 73 23 EEC Produk...

Page 19: ...81 3 32 259 011 Email pfeiffer hakuto co jp Korea Pfeiffer Vacuum Korea Ltd 703 Ho 853 1 Hankuk Mulru Dongchonri Suzi Eup 449 843 Yong in City Kyungkido Phone 82 31 266 0741 Fax 82 31 266 0747 Email s...

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