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10

4. Operations 

4.2. Filling In The Lubricant

– The ttu

urrb

bo

om

mo

olle

ec

cu

ulla

arr  d

drra

ag

g  p

pu

um

mp

p bearing has been filled

with the required amount of lubricant in the works.

– The d

diia

ap

ph

hrra

ag

gm

m  p

pu

um

mp

p is lubricated for the whole of its 

working life.

– The rro

otta

arryy  vva

an

ne

e  vva

ac

cu

uu

um

m  p

pu

um

mp

p must be filled with

operating fluid P3 before first time starting. A filling of 
operating fluid is included with the delivery consignment.

Procedure:

(please also refer to Section 6.1.).

Unscrew two screws on the right-hand side panel. Slightly
lift the panel and remove.

Unscrew operating fluid filler screw 8.

Unscrew the locking screw on the operating fluid flask
(included) and screw on the filling hose (in the side panel).

Insert the filling hose in the operating fluid filler opening
and allow operating fluid to flow in; the amount and type of
operating fluid is shown on the rating plate.

Screw in operating fluid filler screw 8 and take care with
the O-ring.

Re-secure the filling hose in the side panel.

Fit the side panel back onto the pumping station.

4.3. Operational Behaviour With Gas Load

Water cooling is necessary if the pumping 

station is to be operated with gas load.

Details regarding the operational behaviour with gas load can
be found in the respective turbopump operating instructions.

CAUTION

4.1. Transportation Protection

Pumping stations which contain a Diaphragm Pump 
MVP 055-3 or a rotary vane vacuum pump are shipped with
transportation protection (please see also the sticker on the
pumping station).The following must be removed before 
first-time starting:

Remove both side panels from the pumping station by
unscrewing each two screws.

Disconnect the earthing cable from the side panels.

Unscrew the Allan head screws 10 (M6) from both sides of
the pumping station base.

10

10

The transportation protection is now removed. The side
panels can be re-fitted. Caution: Re-connect the earthing
cable.

Summary of Contents for TSH 071

Page 1: ...Turbomolecular Drag Pumping Stations PT 0031 BE H 0408 TSH 071 TSU 071 TSH 261 TSU 261 TSH 521 TSU 521 Betriebsanleitung Operating Instructions...

Page 2: ...l Schema 7 Connection Involving Rotary Vane Vacuum Pumps 8 Connection Involving Diaphragm Pumps 9 4 Operations 10 4 1 Transportation Protection 10 42 Filling In The Lubricant 10 4 3 Operational Behavi...

Page 3: ...tomatically following an interruption to the mains power supply For this reason access to the vacuum chambers for example via doors flanges valves may only be opened once the pumping station has been...

Page 4: ...ry vane vacuum pump must be filled with operating fluid The operating fluid is contained in a pack inclu ded with the delivery consignment Before first time starting on pumping stations equipped with...

Page 5: ...operating fluid is included in the delivery consignment and must be filled into the pump before first time operating Diaphragm pumps do not require lubricant Permissible magnetic fields TSH 071 TSU 07...

Page 6: ...of accessories please refer to Section 3 7 Connections Plan 3 5 Connecting The Vacuum Unit There should be no unilateral loading on the high vacuum flange The weight of a vacuum chamber freely flange...

Page 7: ...MEASURANCE TERMINAL STRIP X1 3 TERMINAL STRIP TSHU 071 261 521 RS 485 REMOTE VENT FAN HEAT TMS FV PUMP X2 PM 051 409 X 13 14 1S2 1X2 PE PE TC 1E5 PM 051 101 T POT EQUALIZATION FRAME GROUNDING M 1 U V...

Page 8: ...CKING PUMP AS ROTARY VANE PUMP 21 X1 22 X1 A1 A2 1K1 12 21 14 1 2 1 2 12 21 14 1K1 1 4 K A 1 2 3 4 FV PUMP ws PM 051 409 X gn bn ge Z MAINS TURBO PE PE 18 OPTION 19 20 A1 A2 PE 1Y8 TVV 001 FORE VACUUM...

Page 9: ...X gn bn ge Z MAINS BACKING PUMP AS DIAPHRAGM PUMP 21 X1 22 X1 240VAC 5A SOLID STATE RELAY PE TURBO PE M 1 U V PE 1E8 FAN 17 15 X1 16 X1 M 1 U V PE 1M7 BACKING PUMP 18 1G5 POWER SUPPLY 20 19 A1 A2 PE 1...

Page 10: ...nt and type of operating fluid is shown on the rating plate Screw in operating fluid filler screw 8 and take care with the O ring Re secure the filling hose in the side panel Fit the side panel back o...

Page 11: ...itched off with the key 6 Pumpstand EIN AUS pumping station ON OFF Turbopump and vacuum chamber are vented via Venting Valve TVF 005 which opens for 0 3 seconds when the venting frequency does not att...

Page 12: ...right hand side Exert slight downward pressure on operating fluid duct 6 turn 90 and bring into the forward position Unscrew operating fluid drain screw 7 and drain operating fluid via operating flui...

Page 13: ...hich are contaminated microbiologically explosively or radioactively cannot be accepted as a matter of principle Fill out the declaration of contamination In every case the Declaration of Contaminatio...

Page 14: ...3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 Rotary Vane Pump DUO 2 5 m 3 h 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 UNO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 10 m 3 h 10 10 10 10 10 10 10 10...

Page 15: ...onnection Durchf hrung Me kabel Auspuff G1 2 Exhaust G1 2 Feedthrough Measurement cable Sperrgas Flutgas Sealing gas Venting gas Wasserk hlung Water cooling 3 150 145 275 96 Betriebsmittel abla rinne...

Page 16: ...ug PM 041 903 T PM 0542 BN 208 V UL plug PM 041 904 T 115 V UL plug PM 041 905 T TMH TMU 521 230 V Schuko plug PM 051 096 T PM 0542 BN 208 V UL plug PM 051 097 T 115 V UL plug PM 051 098 T Water cooli...

Page 17: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 18: ...the product specified below is in accordance with the provision of EU Machinery Directive 98 37 EEC EU Electromagentic Compatibility Directive 89 336 EEC and EU Low Voltage Directive 73 23 EEC Produk...

Page 19: ...81 3 32 259 011 Email pfeiffer hakuto co jp Korea Pfeiffer Vacuum Korea Ltd 703 Ho 853 1 Hankuk Mulru Dongchonri Suzi Eup 449 843 Yong in City Kyungkido Phone 82 31 266 0741 Fax 82 31 266 0747 Email s...

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