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(03/04)

Adressen • Addresses

Argentina

ARO S.A., Av. Belgrano 369,
1092 Buenos Aires, Phone: +54 / 11 4331 5766,
Fax: +54 / 11 4331 3572, Email: [email protected]

Australia

Scitek Australia Pty. Ltd., Suite 1B,
10-18 Cliff Street, Milsons Point, NSW 2061,
Phone: +61 / 2 9954 1925, Fax: +61 / 2 9954 1939,
Email: [email protected]

Austria

Pfeiffer Vacuum Austria GmbH
Diefenbachgasse 35, A-1150 Wien,
Phone: +43 / 1 8941 704, Fax: +43 / 1 8941 707
Service Hotline: +43 / 1 8941704, 
Email: [email protected]

Branch Office, Czech Republic

Pfeiffer Vacuum Austria GmbH, Branch Prague
Zvonarska 885, CZ-156 00 Praha 5
Phone: + 420/257 923 888, Fax: + 420/257 923 014
Email: [email protected]

Belgium / Luxemburg

Pfeiffer Vacuum Belgium N.V./S.A.
Luxemburgstraat 5, B-9140 Temse
Phone: +32 / 3 710 5920, Fax: +32 / 3 710 5929
Service Hotline: +32 / 3 710 5922, 
Email: [email protected]

Brazil

Elmi Tec
Assistencia Técnica e Representação S/C Ltda.
Rua Bernadino de Compos, 551-Brooklin
CEP 04620-002 São Paulo, SP - Brasil
Phone: +55 / 11 5532 0740, Fax: +55 / 11 5535 3598,
Email: [email protected]

Chile

BERMAT S.A., Coyancura 2283, Oficina 601
Providencia, P.O. Box 9781, Santiago
Phone: +56 / 2 231 8877, Fax: +56 / 2 231 4294,
Email: [email protected]

Colombia

Arotec Colombiana S.A., Carrera 16 No. 36-95
Apartado 050 862, Santafe de Bogota  /  Colombia
Phone: +57 / 1 288 7799, Fax: +57 / 1 285 3604,
Email: [email protected]

Denmark

Pfeiffer Vacuum Scandinavia AB, Vesterengen 2,
DK-2630 Taastrup, Phone: +45 / 43 52 38 00, 
Fax: +45 / 43 52 38 50, Email: [email protected]

France

Pfeiffer Vacuum France SAS 45, rue Senouque, BP 139
F-78531 BUC Cedex, Phone: +33 / (0)1 30 83 04 00,
Fax: +33 / (0)1 30 83 04 04, Email: [email protected]

Germany

Pfeiffer Vacuum GmbH,
Berliner Strasse 43, D-35614 Asslar
Phone: +49 / 6441 802 400, Fax: +49 / 6441 802 399
Service Hotline: +49 / 6441 802 333, 
Email: [email protected]

Great Britain

Pfeiffer Vacuum Ltd.
2-4 Cromwell Business Centre
Howard Way, Interchange Park
Newport Pagnell, MK16 9QS, United Kingdom
Phone: +44 / 1 908 500615, Fax: +44 / 1 908 500616,
Email: [email protected]

Greece

Analytical Instruments S.A., 1 Mantzarou St.,
GR-15451 Athens, Phone: +30 / 210 674 8973-7, 
Fax: +30 / 210 674 8978, Email: [email protected]

Hong Kong

Pfeiffer Vacuum Asia Ltd.
c/o Hakuto Enterprises Ltd.
8th Floor World Trade Center
No. 280 Gloucester Road
Causeway Bay
Hong Kong
Phone: +852 2578 4921, Fax: +852 2807 2498,
Email: [email protected]

India

Pfeiffer Vacuum India Ltd.
25-5 Nicholson Road, Tarbund
Secunderabad 500 009, 
Phone: +91 / 40 2775 0014, Fax: +91 / 40 2775 7774,
Email: [email protected]

Israel

ODEM Scientific Applications Ltd.
9 Hamazmera St., P.O.B. 2001 Nes Ziona
Phone: +972 8 938 0333, Fax: +972 8 938 0334,
Email: [email protected]

Italy

Pfeiffer Vacuum Italia S.p.a.
Via San Martino, 44  I-20017 RHO (Milano)
Phone: +39 / 2 93 99 051, Fax: +39 / 2 93 99 05 33,
Email: [email protected]

Japan

Hakuto Co. Ltd., C.P.O. Box 25,
Vacuum Scientific Instruments Division
C.P.O. Box 25, Tokyo 100-91, Phone: +81 / 3 32 258 910, 
Fax: +81 / 3 32 259 011, Email: [email protected]

Korea

Pfeiffer Vacuum Korea Ltd., 
703 Ho, 853-1, Hankuk Mulru, Dongchonri, Suzi-Eup, 
449-843 Yong-in City, Kyungkido, 
Phone: +82 / 31 266 0741, Fax: +82 / 31 266 0747,
Email: [email protected]

Netherlands

Pfeiffer Vacuum Nederland BV
Veldzigt 30a, NL-3454 PW De Meern,
Phone: +31 / 30 6666050, Fax: +31 / 30 6662794,
Email: [email protected]

Peru

Ing. E. Brammertz s.r.l., José Pardo 182,
Apartado 173, PE-18 Miraflores, Phone: +51 / 1 445 8178,
Fax: +51 / 1 445-1931, Email: [email protected]

Poland

Softrade Sp.z.o.o, ul. Grunwaldzka 391,
PL-60-173 Poznan, Phone: +48 / 61 8677 168,
Fax: +48 / 61 8677 111, Email: [email protected]

Portugal

Tecnovac
Tecnologia de Vacio S.L., 
Sector Literatos, 38 - Local 1, 
ES-28760 Tres Cantos (Madrid)
Phone: +34 / 91 804 11 34, Fax: +34 / 91 804 30 91,
Email: [email protected]

Singapore

APP Systems Services Pte Ltd, 11, Toh Guan Road East,
#03-01 APP Enterprise Building, Singapore 608603,
Phone: +65 / 6425 6611, Fax +65 / 6560 6616, 
Email: [email protected]

Spain

Tecnovac
Tecnologia de Vacio S.L., 
Sector Literatos, 38 - Local 1, 
ES-28760 Tres Cantos (Madrid)
Phone: +34 / 91 804 11 34, Fax: +34 / 91 804 30 91,
Email: [email protected]

Sweden

Pfeiffer Vacuum Scandinavia AB
Johanneslundsvägen 3
SE-194 61 Upplands Väsby, Phone: +46 / 8 590 748 10, 
Fax: +46 /8 590 748 88, Email: [email protected]

Switzerland

Pfeiffer Vacuum Schweiz S.A.
Förrlibuckstraße 30, CH-8005 Zürich
Phone: +41 / 1 444 2255, Fax: +41 / 1 444 2266
Email: [email protected]

South Africa

Labotec Pty Ltd., P.O. Box 6553,
Halfway House, 1685 Midrand
Phone: +27 / 11 315 5434, Fax: +27 / 11 315 5882,
Email: [email protected]

Taiwan

HAKUTO Taiwan Ltd. Hsinchu office No. 103, 
Hsien Chen 11th Street, Chupei,
HsinChu County, Taiwan, R.O.C. (zip/postal code: 302)
Phone: +886 / 3 554 1020, Fax: +886 / 3 554 0867,
Email: [email protected]

Thailand

Hakuto (Thailand) Ltd.
18th Floor, Chokchail Intíl Bldg.
690 Sukhumvit Road, Klongton, Klongtoey, Bangkok 10110 
Phone: +662 / 259 6244, Fax: +662 / 259 6243,
Email: [email protected]

U.S.A.

Pfeiffer Vacuum, Inc.
24 Trafalgar Square
Nashua, NH 03063-1988, USA
Phone: +1/ 603 578 6500, Fax: +1/ 603 578 6550,
Email: [email protected]

Venezuela

Secotec S.A., Apartado 3452, Caracas 1010-A,
Phone: +58 / 212 573 8687, Fax: +58 / 212 573 1932,
Email: [email protected]

Other countries

AVI - Applied Vacuum Industries GmbH
Leginglenstrasse 17A; CH-7320 Sargans
Switzerland
Phone: +41 / 81 710 03 80
Fax: +41 / 81 710 03 81
Email: [email protected]

Scope of represented countries

Armenia, Azerbaijan, Bangladesh, Belarus, Bulgaria, Cambo-
dia, Estonia, Georgia, Kazakhstan, Kingdom of Nepal, Kirghi-
zia, Latvia, Lithuania, Maldavia, Philippines, P.R. China,
Rumania, Russia, Tajikistan, Turkmenistan, Ukraine, Uzbeki-
stan, Vietnam

A.E.M.S.

Advanced Equipment Materials and Systems
P.O. Box 25
Föhrenweg 18
FL-9496 Balzers
Phone: +423/ 380 0550
Fax: +423/ 380 0551
Email: [email protected]

Scope of represented countries

Bahrain, Egypt, Iraq, Iran, Jordan, Kuwait, Lebanon, Lybia,
Oman, Pakistan, Saudi-Arabia, Sudan, Syria, Turkey, United
Arab Emirates, Yemen

Zentrale/Headquarters

Pfeiffer Vacuum GmbH 
Berliner Strasse 43
D-35614 Asslar

Telefon 06441/802-0
Telefax 06441/802-202
Hotline 06441/802-333
www.pfeiffer-vacuum.net

Summary of Contents for TSH 071

Page 1: ...Turbomolecular Drag Pumping Stations PT 0031 BE H 0408 TSH 071 TSU 071 TSH 261 TSU 261 TSH 521 TSU 521 Betriebsanleitung Operating Instructions...

Page 2: ...l Schema 7 Connection Involving Rotary Vane Vacuum Pumps 8 Connection Involving Diaphragm Pumps 9 4 Operations 10 4 1 Transportation Protection 10 42 Filling In The Lubricant 10 4 3 Operational Behavi...

Page 3: ...tomatically following an interruption to the mains power supply For this reason access to the vacuum chambers for example via doors flanges valves may only be opened once the pumping station has been...

Page 4: ...ry vane vacuum pump must be filled with operating fluid The operating fluid is contained in a pack inclu ded with the delivery consignment Before first time starting on pumping stations equipped with...

Page 5: ...operating fluid is included in the delivery consignment and must be filled into the pump before first time operating Diaphragm pumps do not require lubricant Permissible magnetic fields TSH 071 TSU 07...

Page 6: ...of accessories please refer to Section 3 7 Connections Plan 3 5 Connecting The Vacuum Unit There should be no unilateral loading on the high vacuum flange The weight of a vacuum chamber freely flange...

Page 7: ...MEASURANCE TERMINAL STRIP X1 3 TERMINAL STRIP TSHU 071 261 521 RS 485 REMOTE VENT FAN HEAT TMS FV PUMP X2 PM 051 409 X 13 14 1S2 1X2 PE PE TC 1E5 PM 051 101 T POT EQUALIZATION FRAME GROUNDING M 1 U V...

Page 8: ...CKING PUMP AS ROTARY VANE PUMP 21 X1 22 X1 A1 A2 1K1 12 21 14 1 2 1 2 12 21 14 1K1 1 4 K A 1 2 3 4 FV PUMP ws PM 051 409 X gn bn ge Z MAINS TURBO PE PE 18 OPTION 19 20 A1 A2 PE 1Y8 TVV 001 FORE VACUUM...

Page 9: ...X gn bn ge Z MAINS BACKING PUMP AS DIAPHRAGM PUMP 21 X1 22 X1 240VAC 5A SOLID STATE RELAY PE TURBO PE M 1 U V PE 1E8 FAN 17 15 X1 16 X1 M 1 U V PE 1M7 BACKING PUMP 18 1G5 POWER SUPPLY 20 19 A1 A2 PE 1...

Page 10: ...nt and type of operating fluid is shown on the rating plate Screw in operating fluid filler screw 8 and take care with the O ring Re secure the filling hose in the side panel Fit the side panel back o...

Page 11: ...itched off with the key 6 Pumpstand EIN AUS pumping station ON OFF Turbopump and vacuum chamber are vented via Venting Valve TVF 005 which opens for 0 3 seconds when the venting frequency does not att...

Page 12: ...right hand side Exert slight downward pressure on operating fluid duct 6 turn 90 and bring into the forward position Unscrew operating fluid drain screw 7 and drain operating fluid via operating flui...

Page 13: ...hich are contaminated microbiologically explosively or radioactively cannot be accepted as a matter of principle Fill out the declaration of contamination In every case the Declaration of Contaminatio...

Page 14: ...3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 Rotary Vane Pump DUO 2 5 m 3 h 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 UNO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 10 m 3 h 10 10 10 10 10 10 10 10...

Page 15: ...onnection Durchf hrung Me kabel Auspuff G1 2 Exhaust G1 2 Feedthrough Measurement cable Sperrgas Flutgas Sealing gas Venting gas Wasserk hlung Water cooling 3 150 145 275 96 Betriebsmittel abla rinne...

Page 16: ...ug PM 041 903 T PM 0542 BN 208 V UL plug PM 041 904 T 115 V UL plug PM 041 905 T TMH TMU 521 230 V Schuko plug PM 051 096 T PM 0542 BN 208 V UL plug PM 051 097 T 115 V UL plug PM 051 098 T Water cooli...

Page 17: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 18: ...the product specified below is in accordance with the provision of EU Machinery Directive 98 37 EEC EU Electromagentic Compatibility Directive 89 336 EEC and EU Low Voltage Directive 73 23 EEC Produk...

Page 19: ...81 3 32 259 011 Email pfeiffer hakuto co jp Korea Pfeiffer Vacuum Korea Ltd 703 Ho 853 1 Hankuk Mulru Dongchonri Suzi Eup 449 843 Yong in City Kyungkido Phone 82 31 266 0741 Fax 82 31 266 0747 Email s...

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