Display Problem
Possible causes
Remedy
F003
TMS heating circuit temper-
ature sensor
● TMS temperature not in
the permissible range
b5 °C and
85 °C
● Check the operating conditions
● Contact Pfeiffer Vacuum Service.
F007
Undervoltage/power failure
● Mains failure
● Check the mains supply
F018
Operating supremacy con-
flict
● Pumping station switch-
ed on with
[P:010]
while
E74 input "start/stop" is
off (opened)
● Switch on the pumping station via E74
● Switch the pumping station off via
[P:010]
.
F021
Blocking signal invalid
● Signal of the blocking
signal monitoring out-
side the valid range
● Check the connections of the sealing gas
monitoring
● Check the parameter options of the accesso-
ry outputs
F034
Sealing gas flow low
● Signal of the sealing
gas monitoring valid but
below the set threshold
[P:791]
● Check and improve the sealing gas supply
● Check the operating conditions
F045
Motor high temperature
● Faulty cooling
● Improve the cooling
● Check the operating conditions
F076
Electronics high tempera-
ture
● Faulty cooling
● Improve the cooling
● Check the operating conditions
F097
Invalid pump information
● Data of the pump faulty
● Acknowledging restores factory setting
F098
Incomplete pump informa-
tion
● Connection to the pump
faulty
● Contact Pfeiffer Vacuum Service.
F100
Rotation speed raised to
minimum value
● Permissible specifica-
tions for rotation speed
operation or stand-by in-
correct
● Check
[P:707]
or
[P:717]
● Obtain the valid rotation speed range from
the technical data of the Turbopump
F115
Pump lower part tempera-
ture evaluation faulty
● Contact Pfeiffer Vacuum Service.
F116
Bearing temperature evalu-
ation faulty
● Contact Pfeiffer Vacuum Service.
F117
Pump lower part high tem-
perature
● Faulty cooling
● Improve the cooling
● Check the operating conditions
F118
Final stage high tempera-
ture
● Faulty cooling
● Contact Pfeiffer Vacuum Service.
● Check the operating conditions
F119
Bearing high temperature
● Faulty cooling
● Improve the cooling
● Check the operating conditions
F143
High operating fluid pump
temperature
● Faulty cooling
● Improve the cooling
● Check the operating conditions
F168
High delay
● Rate of pressure rise
too high, venting rate
too high
● Check and adapt pump-specific venting rate
Tbl. 14:
Error and warning messages for turbopump electronic drive unit
Display Problem
Possible causes
Remedy
E042
Inconsistent software
Checksum errors
● Contact Pfeiffer Vacuum Service.
E091
Unknown hardware
● Contact Pfeiffer Vacuum Service.
E098
Internal communication error between interface
board and drive
● Contact Pfeiffer Vacuum Service.
Malfunctions
45/60
