12 Technical data and dimensions
12.1 General
This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps.
Technical data
Maximum values refer exclusively to the input as a single load.
● Specifications according to PNEUROP committee PN5
● ISO 27892 2010:"Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown
torque"
● ISO 21360 2012: “Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance - Part 1: General description”
● ISO 21360 2018: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance - Part 4: Turbomolecular vacuum pumps"
● Ultimate pressure with test dome after 48 h bake out duration
● Gas throughput with water cooling; backing pump = rotary vane pump (10 m
3
/h)
● Cooling water consumption at maximum gas throughput, cooling water temperature 25 °C
● Integral leakage rate with 100 % helium concentration, 10 s measurement duration
● Sound pressure level at distance to vacuum pump = 1 m
mbar
bar
Pa
hPa
kPa
Torr | mm Hg
mbar
1
1 · 10
-3
100
1
0.1
0.75
bar
1000
1
1 · 10
5
1000
100
750
Pa
0.01
1 · 10
-5
1
0.01
1 · 10
-3
7.5 · 10
-3
hPa
1
1 · 10
-3
100
1
0.1
0.75
kPa
10
0.01
1000
10
1
7.5
Torr | mm Hg
1.33
1.33 · 10
-3
133.32
1.33
0.133
1
1 Pa = 1 N/m
2
Tbl. 16:
Conversion table: Pressure units
mbar l/s
Pa m
3
/s
sccm
Torr l/s
atm cm
3
/s
mbar l/s
1
0.1
59.2
0.75
0.987
Pa m
3
/s
10
1
592
7.5
9.87
sccm
1.69 · 10
-2
1.69 · 10
-3
1
1.27 · 10
-2
1.67 · 10
-2
Torr l/s
1.33
0.133
78.9
1
1.32
atm cm
3
/s
1.01
0.101
59.8
0.76
1
Tbl. 17:
Conversion table: Units for gas throughput
12.2 Technical data
Classification
HiCube 30 Eco
HiCube 30 Eco
HiCube 30 Eco
Flange (in)
DN 40 ISO-KF
DN 40 ISO-KF
DN 40 ISO-KF
Flange (out)
Silencer, G 1/8"
Silencer, G 1/8"
Silencer, G 1/8"
Turbopump
HiPace 30
HiPace 30
HiPace 30
Backing pump
MVP 015-2
MVP 015-4
MVP 030-3
Technical data and dimensions
50/60
