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REGULAR
MAINTENANCE
1
444C-E-MMA01-A09-04
Check Every 560 Hours (Once a Month)
13.
Press
UNLOCK
+
START
.
14.
Press Output check .
• “Output check” screen is displayed.
15.
Select the operation position (the
table with the transfer head of which
the vacuum pressure is to be mea-
sured).
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