Page 1-65
REGULAR
MAINTENANCE
1
444C-E-MMA01-A08-03
Check Every 560 Hours (Once a Month)
Select the nozzle position to be measured, and measure.
(Here we start with position 1 as an example.)
8.
Turn OFF the vacuum for the nozzle
position that will not be measured
and pos1 to pos6 of the facing head.
∗
Press
UNLOCK
+ for pos 2 to 6.
∗
One vacuum pump is shared with AF and AR,
and another is shared with BF and BR.
9.
Lower the nozzle of the position to be
measured.
∗
Press
UNLOCK
+ for pos 1.
∗
The screen at the left shows the setting when
the preparation for measuring at nozzle
position 1 is over.
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Vacuum
ON
Nzl Extend
OFF