Olympus AL120-6Series, Maintenance Manual, Page: 52 / 66

Test Programs Maintenance Manual
3-22
Page
Test No./
Test Name
Function Outline
No. 23
Loader
settings
<Condition setting>
This program can be used for detailed loader settings.
Press the [Start] button.
Setting items are displayed on the liquid crystal panel.
Change the settings using the 4-way button.
Use the menu buttons on the liquid crystal panel for registration, cancellation, and page feed.
[M1]: Register <Save>
[M2]: Cancel <Cancel>
[M3]: Next page <PageUp>
[M4]: Previous page <PageDn>
Setting items ..................................................................... [ Default ]
Number of rotations for orientation flat alignment
<Rotation of orientation flat> .......................................................
1st rotation [1] / 2nd rotation [2]
Orientation flat alignment position
<Priority of orientation flat> ......................................................... Detected [Detect ]
/First [First]
Check for presence of the stage during the A-arm vertical movement
<Check stage(A-arm up/dn)>...................................................... ON [ON]
/ OFF [OFF]
Use of multiple types of wafers
<Wafer size>............................................................................. Multiple [Multi]
/ Single [single]
Setting of sequence when power is turned on Top Macro
<Top macro button>.................................................................... ON [ON]
/ OFF [OFF]
Setting of sequence when power is turned on Back Macro
<Back macro button> ................................................................. ON [ON]
/ OFF [OFF]
Setting of sequence when power is turned on 2nd Back Macro
<2nd back macro button> ........................................................... ON [ON]
/ OFF [OFF]
Setting of sequence when power is turned on Microscope
<Microscope button> .................................................................. ON [ON]
/ OFF [OFF]
Setting of slot with which wafer transfer begins in a cassette
<Start slot> ................................................................................. Top [Top ]
/ Bottom [Bottom]
Numbering of wafers in a cassette
<No. on wafers in cassette> ....................................................... From bottom 1 [Bottom] / From top 1 [Top]
Registration of wafers unloaded during operation
<Register wafer unloading> ........................................................ ON [ON]
/ OFF [OFF]
Return to origin when power is turned on
<Initialize> .................................................................................. Automatic [Auto]
/ Standby [Manual]
Start activated by the stage sensor
<Stage set start> ........................................................................ ON [ON]
/ OFF [OFF]
Use of the vacuum stage
<Vacuum stage> ....................................................................... Used [Used]
/ Not used [Not used]
Contact centering unit
<Contact centering unit>............................................................. Not used [Not used]
/ Used [Used]
Operation from the COM port
<COM Port> ............................................................................... Disable [Disable]
/ Enable [Enable]
Automatic selection of wafer type
<Wafer select> ........................................................................... Manual [Manual]
/ Automatic [Auto]
Buzzer at the end of the A-arm down movement
<A buzzer when A-arm is down>................................................. OFF [OFF]]
/ ON [ON
Source pressure sensor
<Main vacuum sensor>............................................................. Not used [Not used] / Used [Used]
•
Press the [M1]: Register <Save> button to register settings and terminate the setting operation.
Press [M2] button to quit without making corrections: Cancel <Cancel>
•
In the above described items, items for optional parts are included.
Some of the above described items may not be enabled, although they are selected and enabled,
depending on the specifications of your loader unit.