Olympus AL120-6Series, Maintenance Manual, Page: 46 / 66

Test Programs Maintenance Manual
3-16
Page
Test No./
Test Name
Function Outline
[M4]: Elevator<Elevator origin>
4-way button [UP]: Move upward by one pulse
4-way button [DOWN]: Move downward by one pulse
[M1]: Initialize
[M2]: Alternately move to the initialization position and a position 0.5 mm lower
[M3]: Turn excitation OFF
The sensor and motor origin signal states are indicated by the LEDs on the Wafer No. selector buttons.
[No. 1]: Origin sensor detection ON:OFF
[No. 2]: Motor driver origin ON:OFF
Press the [Quit] button, and the loader is initialized and stops the operation.
No. 14
Centering
transfer
position
check <Centering adjustment>
This program can be used to check and adjust the centering position for each wafer diameter.
Press the [Start] button.
Insert the wafers into any slot of a cassette.
Using the 4-way button, select the number of wafer type to adjust or register from the list of wafer
type numbers displayed on the liquid crystal panel, and then press the [Start] button.
(Registration is done for each wafer diameter. Registration for each wafer thickness is not
available.)
Mapping is performed and the [Wafer No.] button for a slot in which there is a wafer blinks.
Press the [Wafer No.] button to specify the slot into which the wafer to be adjusted has been
inserted. The [Wafer No.] button for the selected slot stops blinking and stays lit.
Press the [Start] button.
The selected wafer is loaded from the cassette. After centering is performed, the wafer continues
spinning on the center table.
Note:
For the AL120-86, wafer decentering can be checked by looking at the voltages of the orientation flat
sensors at 90-degree intervals that are displayed on the liquid crystal panel.
For the AL120-6, the voltages of the orientation flat sensors are not displayed.
Using the 4-way button, correct the centering position. The correction value can be set in 0.04 mm
intervals.
Stop the center table rotation before making corrections.
[Start]: Pause the rotation
4-way button [UP]
: Far side <Far>
4-way button [DOWN] : Near side <Near>
4-way button [LEFT] : Left <LEFT>
4-way button [RIGHT]
: Right <RIGHT>
Register the correction value.
[M1]: Register <Save>
The registered correction data is saved in the internal memory.
After the data is put in the internal memory, the orientation flat is adjusted, the wafer is loaded into
the cassette, and you are brought back to the step
.
•
Display and registration are effective when the center table rotation is stopped.
•
When the [Quit] button is pressed, the orientation flat is adjusted and the wafer is loaded into the
cassette.
The orientation flat must be at the 45-degree position toward the front.
• If you do not press [M1] button but press the [Quit] button instead, the wafer is unloaded into the
cassette without saving the data.