Olympus AL120-6Series, Maintenance Manual, Page: 50 / 66

Test Programs Maintenance Manual
3-20
Page
Test No./
Test Name
Function Outline
Put the centering jig on the macro table in a way that the hole at the center of the centering jig is
set at a po3 mm from the hole at the center of the macro table.
Press the [M4] button to register the +3 mm position.
[M2]:Check the sensor movement <Move check>
With the centering position established for an 8- or 6-inch wafer, whether or not proper centering
movement is performed can be checked by manipulating the menu buttons on the liquid crystal
panel.
Using the 4-way button, select the number of wafer type to adjust or register from the list of wafer type
numbers displayed on the liquid crystal panel, and then press the [Start] button.
[M1]: Switch between macro vacuum ON and OFF <Vacuum valve change>
[M2]: Centering movement <Centering>
[M3]: M rotations <Rotation>
•
Press the [Quit] button to finish the process of unloading wafers into the cassette.
No. 20
LED lamp
check <LED lamp check>
This program can be used to check that the LED lamps light up.
Press the [Start] button.
•
All the LED lamps on the operation panel blink. (The buzzer sounds at the same time.)
•
The liquid crystal panel backlight blinks.
•
The stage transfer permission lamp (LED) blinks.
•
Press the [Quit] button, and the loader returns to its initial state and stops the operation.
No. 21
Button
operation
check
<Button motion check>
This program can be used to check the operation button motions.
Press the [Start] button.
•
Press a button with an LED, and the LED lights up on the pressed button.
•
Press the All/Sampling button, and all the LEDs light up.
•
Press the menu buttons [M1] to [M4] on the liquid crystal panel, and [M1] to [M4] appear on the liquid
crystal panel.
•
When the 4-way button on the liquid crystal panel is pressed, [UP], [DOWN], [LEFT] or [RIGHT]
corresponding to the button pressed is displayed on the liquid crystal panel.
•
When the [Orientation flat position] control is manipulated, [Top], [Right], [Bottom] or [Left]
corresponding to the set position is displayed on the liquid crystal panel.
•
When the [Inspection time] control is manipulated, the inspection time corresponding to the set
inspection time is displayed on the liquid crystal panel.
•
When the [Wafer rotation] control is manipulated, [CCW], [Cancel] or [CW] corresponding to the set
rotation is displayed on the liquid crystal panel.
•
Press the [Quit] button, and the loader returns to its initial state and stops the operation.