Olympus AL120-6Series, Maintenance Manual, Page: 38 / 66

Test Programs Maintenance Manual
3-8
Page
Test No./
Test Name
Function Outline
No. 10
Centering
sensor count
check <Centering sensor count check>
This program can be used to check the centering sensor count state.
Press the [Start] button.
Initialized1
Lowers the elevator
Raises the A-arm and turns the horizontal drive motor OFF
Set a wafer on the A-arm so that it is in virtually the same position as during transfer.
Press the [M1] button <Vacuum valve change> to hold the wafer.
Press the [Start] button, and the A-arm moves horizontally and the value detected by the centering
sensor is displayed on the liquid crystal panel.
The following four items are displayed:
S1:#1 Displacement of the detected position toward the front of the sensor [um],
displacement of the detected position toward the back of the sensor [um]
S2:#2 Displacement of the detected position toward the front of the sensor [um],
displacement of the detected position toward the back of the sensor [um]
S3:#3 Displacement of the detected position toward the front of the sensor [um],
displacement of the detected position toward the back of the sensor [um]
S4:#4 Displacement of the detected position toward the front of the sensor [um],
displacement of the detected position toward the back of the sensor [um]
#3 and #4 are displayed only on the AL120-6, not displayed on other models.
The centering sensor detection state is indicated by the LED ON/OFF state of the Wafer No. selector
button.
#1 centering sensor detection ON:OFF
#2 centering sensor detection ON:OFF
#3 centering sensor detection ON:OFF
#4 centering sensor detection ON:OFF
•
The operation will not start when a cassette is set on the elevator.
•
Press the 4-way button [RIGHT] to start initialization in the horizontal direction of the A-arm.
•
When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
•
Press the [Quit] button, and the elevator and the A-arm return to their initial positions and the loader
stops the operation.
Vacuum turns OFF automatically.