Olympus AL120-6Series, Maintenance Manual, Page: 40 / 66

Test Programs Maintenance Manual
3-10
Page
Test No./
Test Name
Function Outline
For the 2nd and 25th wafer, confirm by performing the steps through , and and
12
.
•
Whether a wafer is outside its detection range of the wafer out sensor can be confirmed by viewing
the LED inside the[Option] button
If detected, the LED lights up.
[M2]: Adjust the A-arm and elevator height reference value <A-E position search>
Using the 4-way button, select the number of wafer type to adjust or register from the list of wafer type
numbers displayed on the liquid crystal panel, and then press the [Start] button.
You can select a specific operation from the menu buttons on the liquid crystal panel to then confirm or
adjust the settings.
[M1]: Move to the start position <Move start position>
[M2]: Wafer detection operation <A-E position search>
[M3]: Move to the detection position <A moves to the height of the wafer>
[M4]:
Register <Save>
Insert a wafer with the standard thickness into the first slot of a cassette.
Put the cassette on the elevator.
Press the [M2] button, and the elevator moves down and stops at the specified removal height.
[M1]: Move to the start position <Move start position>
The A-arm moves up and the horizontal excitation turns OFF.
Manually insert the A-arm into the cassette.
Finely adjust the arm insertion height using the 4-way buttons.
4-way button [UP]: Raise the elevator slightly <UP: Elevator 0.1 mm UP>
4-way button [DOWN]: Lower the elevator slightly <DOWN: Elevator 0.1 mm DOWN>
Press the [M2] button.
[M2]: Wafer detection operation <A-E position search>
Vacuum turns ON for the A-arm.
The elevator moves down and stops at a position where a wafer is chucked by a vacuum. The
elevator then moves up.
Manually remove the A-arm from the cassette.
11
Press the [M3] button to move the elevator down to the position where a wafer is chucked by the
vacuum.
[M3]: Move to the detection position <A moves to the height of the wafer>
12
Register the adjusted value. * Check the clearance between the wafer and the A-arm.
[M4]: Register <Save>
13
Press the [Quit] button, and the elevator and the A-arm return to their initial positions as in
step .
•
Pres the [Quit] button to terminate the arm and elevator height reference value adjustment.