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I

NSTRUCTION

M

ANUAL

Vibration Control
System

IN-04913 Vib Con Sys Cover.qxd 8/17/00 9:12 AM Page 1

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Summary of Contents for IPV

Page 1: ...Vibration Control System S 2000 StabilizerTM Vibration Isolators and Optical Table Installation Manual User s Manual...

Page 2: ...ii...

Page 3: ...products which have been repaired or modified without Newport s written approval or products subjected to unusual physical thermal or electrical stress improper installation misuse abuse accident or...

Page 4: ...le Installation Assistance 5 2 1 2 Positioning the Isolators 5 2 1 3 Installing Table Top 6 2 2 Leveling the Table 7 2 3 Isolating the Table Top 8 2 3 1 Installing Leveling Valves 8 2 3 2 Connecting A...

Page 5: ...v 4 3 Table Top Oscillates 21 4 4 System Leaks Air Constantly 21 4 5 Oil Leak From Isolator 21 4 6 Adding Damping Oil 21 5 Factory Service 23...

Page 6: ...e 9 Figure 6 Valves attaching to isolator 9 Figure 7 Orientation of Control Arm 10 Figure 8 Air Line Routing 11 Figure 9 Detail of Valve Connections Single Isolator 12 Figure 10 Detail of Valve Connec...

Page 7: ...000 Stabilizer isolation system is capable of supporting 2000 pounds per isolator Caution must be observed to ensure that heavy payloads are not located off center on the table surface This could caus...

Page 8: ...0 5 degrees from vertical This is necessary for the isolator to function properly in the horizontal mode Note 0 5 degrees is equal to 0 09 2 2 mm inches in 10 0 inches which is the isolator base diame...

Page 9: ...y be used The required pressure is determined by dividing the total load including table weight by the total isolator diaphragm area 25 9 in2 per isolator plus 5 10 psig For example if the table plus...

Page 10: ...preceding the Table of Contents in this manual Should it become necessary to exercise the warranty contact your Newport representative to determine the proper course of action Newport Corporation main...

Page 11: ...ons Table Width ft mm Table Length ft mm A in mm B in mm C in mm 3 900 6 1800 14 341 30 733 35 5 899 3 900 8 2400 14 341 42 1028 47 25 1159 3 900 10 3000 14 341 56 1374 60 25 1479 4 1200 6 1800 14 341...

Page 12: ...isolators located as described in Section 2 1 2 raise the table top and position it above the isolators Be sure each isolator is centered within the tapped three hole patterns on the lower surface of...

Page 13: ...special wrenches to hold the hex nut stationary Insert the prongs of the second wrench into the holes on the bottom of the support plate Rotate the plate using the top wrench to adjust the height 2 Pl...

Page 14: ...to determine a plane The leveling valve locations are selected such that they form the largest triangle possible under the table The larger the triangle the more stable the system will be When two or...

Page 15: ...each valve to the center of its travel Figure 6 2 Attach the leveling valve to the isolators as shown in Figure 6 Secure the valve to the bracket using the two mounting screws and the nutplate Control...

Page 16: ...ors as shown in Figure 8 When cutting tubing be sure the ends are round and cut squarely This is best done with a single edge razor blade scissors will deform the tubing causing leaks The connections...

Page 17: ...y Air Supply Air Regulator Filter Leveling Valves 3 Reqd Leveling Valves 3 Reqd Leveling Valves 3 Reqd Leveling Valves 3 Reqd Tee 3 Reqd Air Regulator Filter Tee 5 Reqd Air Regulator Filter Air Regula...

Page 18: ...table top open the metering valve about 1 8 1 4 of a turn 3 Turn on the air supply and adjust the regulator for the pressure calculated using the formula given in Section 1 6 This pressure must not e...

Page 19: ...r tabs Figure 11 2 Adjust the Table Height sensor screw of each isolator Figure 5 as required to obtain this gap When all isolators are adjusted re check the level of the table NOTE this step should r...

Page 20: ...the isolators for both table sections 2 Carefully uncrate each table top noting the correct orientation indicated on the crates Carefully check the doubler faces for any damage that might prevent the...

Page 21: ...econd table section should be easily pulled up to the first Figure 2 13 shows correct bolt head position during assembly Do not cause the first table section to shift sideways on its isolators Doing s...

Page 22: ...16 Figure 13 Double Bolt Tightening Sequence...

Page 23: ...specialized applications 3 2 Performance Adjustments Once the system is assembled and the table floating it is possible to make minor adjustments to suit your individual needs These adjustments invol...

Page 24: ...for each isolator that they supply 4 Table loads and or load positions change If the loads are moving or changing significantly the control arms may require adjustment Each time the load is changed c...

Page 25: ...he air supply may contaminate the leveling valves or isolator damping system and degrade performance Use of the Newport model ARF Air Regulator and Filter in the air supply will prevent this occurrenc...

Page 26: ...into the isolator accompanied by the familiar sound of moving air Repair or replace any clogged valve Use the ARF filter regulator to prevent this situation 4 2 Poor Isolation Performance The followi...

Page 27: ...the isolator performance Total volume of damping oil per isolator is approximately 1 2 cup 125ml 4 6 Adding Damping Oil If the isolator loses damping oil additional oil may be added as follows 1 Remov...

Page 28: ...bottom of the piston and not on the narrow ledge at the bottom of the support shaft 6 Reverse Steps 2 and 3 to re assemble the isolator Return the support plate to the position noted in Step 2 7 Rein...

Page 29: ...order number 3 Complete description of the problem If components are to be returned to Newport Corporation you will be given a Return Number which you should reference in your shipping documents Plea...

Page 30: ...00 PPM Hexavalent Chromium 0 1 1000 PPM Polybrominated Biphenyls PBB 0 1 1000 PPM Polybrominated Diphenyl Ethers PBDE 0 1 1000 PPM Product RoHS Compliant Part Number SUPPORT SYSTEM TIE BAR S 2000 S 20...

Page 31: ...uments Inc Page 2 of 2 Document Number MKS CD 1138 MKS CONFIDENTIAL Revision B MKS RoHS2 PRODUCT EXEMPTION LISTING MKS Product Number MKS Product Description Annex III Exemption Annex III Exemption De...

Page 32: ...INSTRUCTION MANUAL Vibration Control System...

Page 33: ...entative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Repaired or replaced products are warranted for the balance of the original wa...

Page 34: ...ling the Table 8 2 3 Isolating the Table Top 9 2 3 1 Installing Leveling Valves 9 2 3 2 Connecting Air Lines 11 2 3 3 Adjusting Leveling Valve Sensors 14 2 4 Installing Tables with the Doubler Interfa...

Page 35: ...Isolators 8 2 5 IPV Leveling Valve 9 2 6 Leveling Valve Mounting 10 2 7 Orientation of Control Arm 11 2 8 Air Line Routing 12 2 9 Detail of Valve Connections Single Isolator 13 2 10 Detail of Valve Co...

Page 36: ...t 80 psi Horizontal Resonant Frequency 1 5 Hz Recommended Load Range per 4 isolators 660 to 8 000 lb 300 to 3 600 kg Automatic Leveling Accuracy 0 010 inch 0 25 mm standard higher accuracy available o...

Page 37: ...em Transmissibility 0 8 1 10 30 10 1 0 1 0 01 0 001 FREQUENCY Hz TRANSMISSIBILITY T VerticalTransmissibility atmaximumrecommendedload 0 5 1 10 25 1 0 1 0 01 TRANSMISSIBILITY T FREQUENCY Hz 5 Horizonta...

Page 38: ...ring Needle Valve Air Line to Isolators ModelIPVLevelingValve Mounting Screw Holes Valve Model IPV Leveling Accuracy 0 010 in 25 mm standard Materials Glass fiber reinforced polycarbonate brass Availa...

Page 39: ...viii...

Page 40: ...Heavy payloads with very high centers of gravity C G may cause the isolation system to oscillate Please consult Section 3 2 of this manual or Newport Applications Engineering for high C G applications...

Page 41: ...2 Figure 1 1 Vibration Control System Assembly Clamp 3 per Isolator Leveling Valve 3 per system Leveling Valve 3 per system Wrench Holes Level Adjustment Screw Stabilizer Isolator...

Page 42: ...jor sources of vibration from operating machinery such as elevators air conditioning plants or factory equipment Warning The table top is attached to the isolators with clamps and hex head bolts In th...

Page 43: ...lly Caution Bottled carbon dioxide CO2 is not recommended since icing can occur during rapid filling of the isolators Warranty information may be found on the page preceding the Table of Contents in t...

Page 44: ...ccess Hole AH Clean Room Valve Exhaust System CE 1 Earthquake Restraint System ER Accessories Model No Overhead Shelf Systems 6 long ATS 6 8 long ATS 8 10 long ATS 10 Accessory Shelf AS 1568 Beam Stee...

Page 45: ...the correct dimensions A B C for each table size If your table is not listed the isolator positions for your table will be included in the data package provided with the system A C B Typ 6 152 mm 4 P...

Page 46: ...sure each isolator is centered within the tapped three hole patterns on the lower surface of the table Figure 2 2 Isolator Clamp Hex Head bolt Flat Washer 3 per Isolator Table Bottom Surface Figure 2...

Page 47: ...rify that the centering disks are centered in and resting on their respective guides Figure 2 4 Bolt Clamp Support Plate Centering Disk Centering Guide Hex Nut Wrenches 2 55 in 65 mm Nominal Isolator...

Page 48: ...f the isolators they control In practice however simply grouping the isolators and their control valves is sufficient The groups of isolators and their valves act as three legs for the system The cent...

Page 49: ...ach the leveling valve to the isolators as shown in Figure 2 6 Secure the valve to the bracket using the two mounting screws and the nutplate Position the valve at the bottom of the bracket slots unti...

Page 50: ...ion of Control Arm 2 3 2 ConnectingAirLines A Connect air lines to the isolators as shown in Figure 2 8 When cutting tubing be sure the ends are round and cut squarely This is best done with a single...

Page 51: ...lter Tee 7 Reqd Air Supply Air Regulator Filter Table Width Less 12 Typ All Tables Leveling Valves 3 Reqd Tee 2 Reqd Air Supply Air Regulator Filter 3 Isolator Schematic 4 Isolator Schematic 6 Isolato...

Page 52: ...Needle Valve Figure 2 9 Detail of Valve Connections Single Isolator B Closethemeteringneedlevalve Fig 2 9 oneachvalveandthenopenit 1 2 turn for each isolator that is connected to it For example if th...

Page 53: ...ure 2 11 The gap between the guide and flange should be 1 4 1 16 6mm 1 5mm B Adjust the Table Height sensor screw of each isolator Figure 2 5 as required to obtain this gap When all isolators are adju...

Page 54: ...ction if fewer than four isolators are located under the section E Position the second table section on three jack stands mounted on dollies Adjust the position of the table so that it is at the same...

Page 55: ...M to all bolts using the sequence shown in Figure 2 13 K Jack up the assembled table as required to install the remaining isolators and leveling valves Install the isolators and valves as described i...

Page 56: ...ting it is possible to make minor adjustments to suit your individual needs These adjustments involve the system air pressure the control arms and needle valves Warning Oncethetableisfloating keepfing...

Page 57: ...hanged check the relationship of the centering guide to the flange on each isolator If the desired 1 4 inch is not maintained adjust the overall system pressure and or the sensor positions Newport Vib...

Page 58: ...er 17905 Clamp Inner 17904 Diaphragm 17840 Piston Assy 17908 Tank Assy 17861 Damping Element 4 17051 2 Base 18200 XXX Base Tie Bar 18632 XXX Damping Oil 156 ml 4190 Bracket Valve Supt 18045 Nutplate V...

Page 59: ...entered isolators will remain centered unless the table and isolators are moved relative to each other C Equipment on the table may be vibrating at a resonant frequency of other components Improve the...

Page 60: ...ly supported before getting underneath the table top or removing the isolator B Measuretheheightofthesupportplaterelativetothecenteringdisk Figure2 4 Recordthisdistancesothattheisolatormaybereturned t...

Page 61: ...er which you should reference in your shipping documents Please fill out the service form located on the next page and have the information ready when contacting Newport Corporation Include the comple...

Page 62: ...____________________________________________________________________________________________________________________________________________________________________________ ___________________________...

Page 63: ...24...

Page 64: ...25...

Page 65: ...ifornia has been certified compliant with ISO 9001 by the British Standards Institution Visit Newport Online at www newport com Newport Corporation Worldwide Headquarters 1791 Deere Avenue Irvine CA 9...

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