MKS Mass-Flo 1479A, Instruction Manual, Page: 55 / 72

Appendix A: Product Specifications Physical Specifications
45
Physical Specifications
Body (height x width x length) without
≤
fittings
<5.5 in x
≤
1.5 in x 3 in
<14.0 cm x
≤
3.8 cm x 7.6 cm
Connector options 9-pin Type “D”
15-pin Type “D”
20-pin Edge Card
Digital, RS-485
Digital, DeviceNet
Fittings
Standard
Optional
Cajon
®
4-VCR
®
male compatible
¼” Swagelok compatible, or ¼” tube weld stubs
Internal surface area (500 sccm unit) 7.7 in 2 (49.7 cm 2 )
Internal volume (500 sccm unit) 0.27 in 3 (4.43 cm 3 )
Leak integrity
External (scc/sec He)
Through closed valve
< 1 x 10
-10
< 1.0% F.S. @40 psi
Materials wetted
Body
Seals
Valve Seat
316L VAR SST, 316L SST, nickel
Metal
Kel-F
®,
Teflon
®
Maximum inlet pressure 250 psig
Surface Finish
<16
µ
inches Ra electropolished
Weight
≤ ≤
1.9 lbs (0.86 kg)
Due to continuing research and development activities, these product specifications are subject to change without notice.