MKS Mass-Flo 1479A, Instruction Manual, Page: 53 / 72

Appendix A: Product Specifications Performance Specifications
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Appendix A: Product Specifications
Performance Specifications
Accuracy
1
±1% F.S.
CE Compliance
2
EMC Directive 89/336/EEC
Products with Edge Board connectors and
products used with flying leads are not CE
compliant.
Control range 2.0 to 100% F.S.
Controller settling time
3 < 2 seconds (to within 2% of set point)
Full scale ranges (nitrogen equivalent) 10, 20, 50, 100, 200, 500, 1000, 2000, 5000,
10,000, 20,000* sccm
* Consult factory
Operational differential pressure
4
≤
5000 sccm
10,000 to 20,000 sccm
10 to 40 psid
15 to 40 psid
Pressure coefficient 0.02% Rdg./psi
Repeatability ± 0.2% F.S.
Resolution (measurement) 0.1% F.S.
Temperature coefficients
Zero
Span
< 0.05% F.S./° C (500 ppm)
<0.08% of Rdg/° C (800 ppm)
Warm-up time (to within 0.2% of steady-state) 2 minutes
1
Includes non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0° C.
2
An overall metal braided, shielded cable, properly grounded at both ends, is required during use.
3
Controller settling time per SEMI E17-91, specified for flows starting from 0 to 25% (or greater) F.S.
4
Operational differential pressure is referenced to an MFC outlet pressure at atmosphere.