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Mass Flow Controller Safety Information
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007
Off (Supply)
IEC 417, No.5008
Earth (ground)
IEC 417, No.5017
Protective earth
(ground)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020
Equipotentiality
IEC 417, No.5021
Direct current
IEC 417, No.5031
Alternating current
IEC 417, No.5032
Both direct and
alternating current
IEC 417, No.5033-a
Class ll equipment
IEC 417, No.5172-a
Three phase
alternating current
IEC 617-2 No.020206
Caution, refer to
accompanying
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6
Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit
Summary of Contents for Mass-Flo 1479A
Page 3: ...119474 P1 Rev B 10 97 MKS Type 1479A Mass Flo Controller ...
Page 8: ...Table of Contents vi ...
Page 10: ...List of Figures and Tables viii ...
Page 34: ...Control Valve Chapter Three Overview 24 This page intentionally left blank ...
Page 40: ...The Optional Input Chapter Four Operation 30 This page intentionally left blank ...
Page 44: ...Zero Adjustment Chapter Six Maintenance 34 This page intentionally left blank ...
Page 70: ...Model Code Appendix D Model Code 60 This page intentionally left blank ...