MKS Mass-Flo 1479A, Instruction Manual, Page: 16 / 72

Introduction Chapter One: General Information
6
Reliability
To help provide excellent reliability, the design contains a low mechanical and electronic
components count and has successfully passed the following tests:
•
STRIFE, including temperature cycling and vibration (sine and random tests)
and with an overall metal braided, shielded cable, properly grounded at both ends:
•
EMC Directive 89/336/EEC for CE Mark compliance
Cleanliness Features
The 1479 controller uses metal for all external seals, thus eliminating elastomeric seals which are
a key source of particle generation, outgassing, and permeation. The metal seal also ensures
extremely low external leakage. The internal valve control plug is Teflon
®
or Kel-F
®
(depending on flow range) or Kel-F (depending on flow range) which further reduces outgassing
and particle generation. The 1479A mechanical design minimizes wetted surface area and virtual
leaks, assuring rapid drydown. To further enhance cleanliness, all internal surfaces are precision
machined, electropolished, and subjected to a proprietary cleaning process under Class 100
conditions. The instrument is assembled and double-bagged in a Class 100 environment.