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Unpacking Checklist
Chapter Two: Installation
10
Unpacking Checklist
Standard Parts:
•
The 1479 flow controller
Optional Accessories:
•
Electrical Connector Accessories Kit, 1479A-K1 (includes a mating connector for the I/O
connector)
•
Power Supply/Readout device
•
Cabling to connect the flow controller to the readout device
Environmental Requirements
Follow the guidelines listed below when installing and using the 1479 flow controller.
1. Maintain the normal operating temperature between 0° and 50° C (32° and 122° F).
2. Observe the pressure limits:
A. Maximum gas inlet pressure is 250 psig.
B. Operational differential pressure is:
10 to 40 psid for
≤
5000 sccm units
15 to 40 psid for 10,000 and 20,000 sccm units
The standard valve configuration provides control over this range with the outlet at
atmospheric pressure.
3. Provide power input at ±15 VDC (±5%) @ 200 mA.
A. Maximum voltage/current at startup is ±15 VDC (±5%) @ 200 mA.
B. Typical steady state voltage/current should be ±15 VDC (±5%) @ 100 mA.
4. Allow 2 minutes for warm-up time.
5. Use high purity gas and filters in line upstream of the MFC.
6. Leave the power to the instrument on at all times, for optimal performance.
For additional information refer to Appendix A: Product Specifications, page 43.
Summary of Contents for Mass-Flo 1479A
Page 3: ...119474 P1 Rev B 10 97 MKS Type 1479A Mass Flo Controller ...
Page 8: ...Table of Contents vi ...
Page 10: ...List of Figures and Tables viii ...
Page 34: ...Control Valve Chapter Three Overview 24 This page intentionally left blank ...
Page 40: ...The Optional Input Chapter Four Operation 30 This page intentionally left blank ...
Page 44: ...Zero Adjustment Chapter Six Maintenance 34 This page intentionally left blank ...
Page 70: ...Model Code Appendix D Model Code 60 This page intentionally left blank ...