MKS Mass-Flo 1479A, Instruction Manual, Page: 29 / 72

Chapter Three: Overview Electrical Connections
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Chapter Three: Overview
Electrical Connections
If you are using the 1479 instrument with any equipment other than corresponding MKS power
supply/readout units, consult the manufacturer’s specifications for connection, and for proper
electrical and power characteristics. Refer to Appendix A: Product Specifications, page 43, for
electrical requirements of the Type 1479 flow controller.
The 1479 MFC is available with either a Type “D,” Edge Card, or digital communications
connector. Consult factory for the availability of the digital communications connector.
9-Pin Type “D” Connector
Table 4 lists the pinout of the 9-pin Type “D” connector for the 1479 mass flow controller.
9-Pin Type “D” Connector Pinout
Pin Number Assignment
1 Valve Open/Close
2 Signal Output
3 +15 V
4 Power Common
5 -15 V
6 Set Point Input
7 Signal Common
8 Signal Common
9 MKS Test Point
Table 3: 9-Pin Type “D” Connector Pinout
Note
1. Chassis ground is not available on a separate pin. Instead, it is
carried out through the cable shielding. Be sure that the connector on
the other end of the cable is properly grounded to its chassis ground.
2. The 0 to 5 VDC flow signal output comes from pin 2 and is
referenced to pin 7 (signal common).
3. Use any appropriate 0 to 5 VDC input signal of less than 20K ohm
source impedance referenced to pin 7 as the set point signal to pin 8.