Electrical Connections
Chapter Three: Overview
34
15-Pin Type “D” Connector
Table 8 lists the pinout of the 15-pin Type “D” connector for a mass flow controller.
15-Pin Type “D” Connector Pinout
Pin
Assignment
Pin
Assignment
1
MKS Test Point*
9
No Connection
2
Flow Signal Output
(0 to +5 VDC)
10
Optional Input*
3
Valve Close*
(TTL low)
11
Signal Common
4
Valve Open*
(TTL low)
12
Signal Common
5
Power Supply Common
13
No Connection
6
-15 VDC
14
No Connection
7
+15 VDC
15
Chassis Ground
8
Set Point Input*
(0 to +5 VDC)
* For an MFC only, No Connection for an MFM
Table 8: 15-Pin Type “D” Connector Pinout
Note
1. The “No Connection” pin assignment refers to a pin with no internal
connection.
2. The 0 to 5 VDC flow signal output comes from pin 2 and is
referenced to pin 12 (signal common).
3. Any appropriate 0 to 5 VDC input signal of less than 20K ohm
source impedance referenced to pin 12 can be used to supply a set
point signal to pin 8.
