Copyright © 1999 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Printed in the United States of America
Mass-Flo
®
is a registered trademark of MKS Instruments, Inc., Andover, MA
Swagelok
®
, VCR
®
, and VCO
®
are registered trademarks of Swagelok Marketing Company,
Solon, OH
Kalrez
®
and Viton
®
are registered trademarks of DuPont Dow Elastomers Inc., Wilmington,
DE
NUPRO
®
is a registered trademark of Crawford Fitting Company, Solon, OH
Kel-F
®
is a registered trademark of 3M, Minneapolis, MN
DeviceNet
is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FL
Protected by U.S. Patent 5,461,913; foreign patents pending
