Appendix A: Product Specifications
Physical Specifications
59
Physical Specifications
Body (height x width x length) without
≤
fittings
<5.5 in x
≤
1.5 in x 3 in
<14.0 cm x
≤
3.8 cm x 7.6 cm
Fittings
Swagelok
®
4-VCR
®
male compatible
Swagelok 4-VCO
®
(male) compatible,
¼” Swagelok compatible
Internal Surface Area (500 sccm unit)
7.7 in
2
(49.7 cm
2
)
Internal Volume (500 sccm unit)
0.27 in
3
(4.43 cm
3
)
Leak Integrity
External (scc/sec He)
Through closed valve (MFC only)
< 1 x 10
-9
< 1.0% F.S. @40 psi
Materials Wetted
Body and Valve Seat
Seals
316L SST, nickel, Elgelloy
Viton
®
, Buna-N, Kalrez
®
Neoprene, all-metal
Weight
≤
≤
1.9 lbs (0.86 kg)
Due to continuing research and development activities, these product specifications are subject to change without notice.
