Table of Contents
iv
Interface Cables..........................................................................................................24
Generic Shielded Cable Description...............................................................25
Setup..........................................................................................................................26
Dimensions....................................................................................................27
Gas Line Connections ................................................................................................29
Standard Fittings............................................................................................29
Optional Fittings............................................................................................29
Mounting a Type 1179 MFC ......................................................................................29
Mounting a Type 2179 MFC ......................................................................................30
Chapter Three: Overview .......................................................................................................31
Type 2179 MFC with a Positive Shutoff Valve ..........................................................31
Electrical Connections................................................................................................31
9-Pin Type “D” Connector.............................................................................32
P.C. Edge Card Connector .............................................................................33
15-Pin Type “D” Connector ...........................................................................34
The Gas Correction Factor (GCF)...............................................................................35
How To Calculate the GCF for Pure Gases ....................................................35
How To Calculate the GCF for Gas Mixtures.................................................36
How To Read Mass Flow at a Different Reference Temperature ....................37
Labels ........................................................................................................................38
Control Valve (MFC only) .........................................................................................38
Chapter Four: Operation ........................................................................................................39
How To Start Up the MFC/MFM ...............................................................................39
How To Zero the Flow Controller ..............................................................................40
How To Adjust the Controller Gain (MFC only) ........................................................41
How To Override the Valve (MFC only) ....................................................................42
Priority of the Commands ..............................................................................42
How To Use the Optional Input (MFC only) ..............................................................43
Chapter Five: Theory of Operation.........................................................................................45
General Information ...................................................................................................45
Flow Path...................................................................................................................45
Measurement Technique.............................................................................................45
