MKS 640A/641A, Manual, Page: 8 / 88

Table of Contents
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General Information................................................................................................... 57
Checking the Orifice Size.............................................................................. 57
How To Verify the Orifice Selection.......................................................................... 58
Using Different Gases ................................................................................... 60
Appendix C: Gas Density Table ............................................................................................ 63
Appendix D: Model Code Explanation .................................................................................. 67
Model Code Description ............................................................................................ 67
Index...................................................................................................................................... 73