MKS 640A/641A, Manual, Page: 68 / 88

Appendix A: Product Specifications Physical Specifications
55
Physical Specifications
Burst Pressure
≥
1500 psig
Dimensions 1.5 in x 3.0 in (less fittings) x 5.55 in max.
3.81 cm x 7.62 cm (less fittings) x 14.1 cm max.
Fittings Cajon 4-VCR male compatible, 8-VCR male compatible,
¼ inch Swagelok compatible
Full Scale Ranges
Pressure
Flow
10, 100, 1000 Torr, 60 psi, 100 psi
50, 200, 1000, 5000, 10,000, 20,000, 50,000 sccm
Input Power
± ±
15 VDC
±
5%, 200 mA, maximum
Maximum Cable Length 100 ft.
Overpressure Limit 45 psia or 200% F.S., whichever is greater
Pressure Signal Output 0 to 5 VDC initial configuration
(0 to 10 VDC jumper selectable)
Set Point Input 0 to 5 V or 0 to 10 V (matches the pressure signal output)
Transducer, Baratron
Type 640
Type 641
Absolute pressure capacitance manometer
Gage pressure capacitance manometer
Valve Options
Type
Seal Material
Normally closed
Kel-F, Kalrez, Chemraz, Viton, or all-metal
Weight 2.54 lbs. (1.15 kg)
Wetted Material
Standard
Optional
316L, 316LVAR, Viton, Inconel

, Nickel
316 SS (all-metal), Kalrez, Kel-F, Chemraz
Due to continuing research and development activities, these product specifications are subject to change without notice.