MKS 640A/641A, Manual, Page: 12 / 88

List of Tables
ix
List of Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Table 2: Interface Cables ..........................................................................................................11
Table 7: I/O Connector Pinout..................................................................................................13
Table 3: Fitting Dimension.......................................................................................................17
Table 4: SEMI Specifications for Down Port Fitting Options ...................................................22
Table 5: SEMI 2787.1 C-Seal Retainer (EG&G Part Numbers) ................................................23
Table 6: 0.445 Inch Diameter C-Seal Retainer .........................................................................23
Table 8: Initial Configuration ...................................................................................................31
Table 9: Highest Pressure Suggested for Zero Adjustment of an Absolute Transducer ..............44
Table 10: Orifice Size...............................................................................................................57
Table 11: Valve Orifice Index Number .....................................................................................58
Table 12: Pressure Range Selection ..........................................................................................68
Table 13: Fitting Type Selection...............................................................................................68
Table 14: Valve Type ...............................................................................................................69
Table 15: Seal Material Selection .............................................................................................69
Table 16: Valve Orifice Size Selection .....................................................................................70
Table 17: Trip Point Model Code Entry....................................................................................70
Table 18: Valve Plug Material ..................................................................................................71