MKS 640A/641A, Manual, Page: 10 / 88

List of Figures
vii
List of Figures
Figure 1: Downstream Pressure Control ................................................................................ 16
Figure 2: Upstream Pressure Control ..................................................................................... 16
Figure 7: Front and Back Views of the Side Port 640 Series Controller ................................. 17
Figure 8: Side View of the 640 Series Controller................................................................... 18
Figure 3: Top View of the Down Port Type 640 Controller ................................................... 19
Figure 4: Front and Side View of the Down Port Type 640 ................................................... 19
Figure 5: Bottom View of the Down Port 640 ....................................................................... 20
Figure 6: Bottom View of the Down Port Seals ..................................................................... 20
Figure 9: Bottom View of the Side Port 640 Series Controller............................................... 21
Figure 10: Exploded View of the C-Seal Components ........................................................... 24
Figure 11: Exploded View of the W-Seal Components .......................................................... 26
Figure 12: Exploded View of the Z-Seal Components ........................................................... 28
Figure 13: Top View of the 640 Series Controller.................................................................. 33
Figure 14: Sample Pressure Control System .......................................................................... 35
Figure 15: Effects of the Proportional Control ....................................................................... 36
Figure 16: Effects of the Integral Control .............................................................................. 37
Figure 17: Controller Response with Initial P Term and I Term Values ................................. 38
Figure 18: Controller Response with Increased P Term ......................................................... 39
Figure 19: Controller Response with Increased I Term .......................................................... 39
Figure 20: Serial Number Label............................................................................................. 42
Figure 21: Jumper Positions on the Transducer Board ........................................................... 47
Figure 22: Jumper Positions on the Control Board................................................................. 51
Figure 23: Model Code Explanation ...................................................................................... 57
Figure 24: Flow Range Selection........................................................................................... 59