MKS 275420-1-GQ-T-00011, Instruction Manual

Page: 37 / 52

6 Calibration
Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502 37
1
10
-1
10
-2
Kr
Ar
Ne
He
O
2
10
-3
CH
4
D
2
Freon 22
freon 12
N
2
, air
CO
2
10
-4
10
-4
10
-3
10
-2
10
-1
Indicated Pressure (Torr)
(nitrogen equivalent)
Figure 6-1
Convectron Gauge Indicated vs. True Pressure Curve; 10 -4 to 10 -1 Torr.
Tru
e
Pr
es
su
re
(
To
rr)
Use only when gauge axis is horizontal.
Do not use this data with transducers
other than the G-P Series 275
Convectron Gauge.
Pressure units equivalence:
1
µ m Hg = 1 mTorr = 1 x 10
-3
Torr
1000 µ m Hg = 1 Torr