MKS 275420-1-GQ-T-00011, Instruction Manual

Page: 5 / 52

Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502 5
Chapter 1 Safety Instructions ....................................................................................................................................................... 7
1.1 Safety Introduction......................................................................................................................................................... 7
1.2 Damage Requiring Service .......................................................................................................................................... 8
1.3 Overpressure Conditions ............................................................................................................................................. 9
1.4 Warranty Information ..................................................................................................................................................10
1.5 Service Guidelines .........................................................................................................................................................11
1.6 FCC Verification .............................................................................................................................................................11
1.7 Canadian users ...............................................................................................................................................................12
Chapter 2 Introduction/Specifications ................................................................................................................................... 13
2.1 The Mini-Convectron Gauge Module ...................................................................................................................13
2.2 Specifications .................................................................................................................................................................. 14
2.3 Module Dimensions .....................................................................................................................................................15
Chapter 3 Installation ................................................................................................................................................................... 17
3.1 Receiving Inspection ....................................................................................................................................................17
3.1.1 Damaged Material ..........................................................................................................................................17
3.2 Mini-Convectron Module Installation...................................................................................................................17
3.2.1 Important Precautions for Mini-Convectron Installation ................................................................18
3.2.2 Environment ......................................................................................................................................................19
3.2.3 Location ..............................................................................................................................................................19
3.2.4 Grounding ..........................................................................................................................................................19
3.3 I/O Connector Wiring ..................................................................................................................................................20
Chapter 4 Operation ..................................................................................................................................................................... 21
4.1 Theory of Operation .................................................................................................................................................... 21
4.2 Front Panel Indicators and Adjustments .............................................................................................................22
4.2.1 Module (MOD) LED Status ..........................................................................................................................22
4.2.2 DeviceNet Network (NET) LED Status .....................................................................................................23
4.2.3 Process Control Relay Settings ..................................................................................................................23
4.2.4 Data Rate (Baud Rate) Switches ................................................................................................................25
4.2.5 MAC ID Address Switches ...........................................................................................................................25
Chapter 5 .......................................................................................................................... DeviceNet Operation 27
5.1 DeviceNet Protocol for the Mini-Convectron Module ...................................................................................27
5.1.1 Standard Objects ............................................................................................................................................27
Chapter 6 .......................................................................................................................................... Calibration 33
6.1 Preparing for Pressure Measurement ...................................................................................................................33
6.2 Gas Type ...........................................................................................................................................................................33
6.3 Preparing For Convectron Gauge Operation .....................................................................................................33
6.4 Understanding Convectron Gauge Pressure Measurement In Gases Other Than Nitrogen or Air34
6.4.1 Examples.............................................................................................................................................................36
6.5 Adjustment of Convectron Gauge Zero and Atmospheric Pressure Indications ................................. 43
6.5.1 Calibrate the Vacuum Reading ..................................................................................................................43
6.5.2 Calibrate the Atmosphere Reading .........................................................................................................43
6.5.3 Special Considerations for Convectron Gauge Use Below 10
-3
Torr ...........................................43
Table of Contents