MKS 275420-1-GQ-T-00011, Instruction Manual

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Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502 17
3.1 Receiving Inspection
Installation
Inspect all material received for shipping damage. Confirm that your shipment includes all material and
options ordered. If materials are missing or damaged, the carrier that made the delivery must be notified
within 15 days of delivery in accordance with Interstate Commerce regulations to file a valid claim
with the carrier. Any damaged material including all containers and packing should be held for carrier
inspection. Contact MKS if the shipment is not correct for reasons other than shipping damage.
3.1.1 Damaged Material
Any damaged material, including all containers and packaging, should be held for carrier inspection.
If your shipment is not correct for reasons other than shipping damage, contact MKS.
3.1.1.1 International Shipments
If an airfreight forwarder handles the shipment and their agent delivers the shipment to customs the
claim must be filed with the airfreight forwarder.
If an airfreight forwarder delivers the shipment to a specific airline and the airline delivers the
shipment to customs the claim must be filed with the airline,
not the freight forwarder.
All materials have been chosen for ultra high vacuum service, corrosion resistance and bakeable to
150 °C. The gauge tube envelope is type 304 stainless steel. All metallic joints in the envelope are
welded. No solder is used within the envelope. The following materials are exposed to the vacuum:
Type 304 stainless steel, Carpenter Alloy 52, Kovar, Kapton
®
, gold-plated Tungsten (or Platinum) and
borosilicate glass.
3.2 Mini-Convectron Module Installation
Dimensions of the Mini-Convectron Module are given in Figure 2-2 on page 15.
Cleanliness pays. Keep the port cover in place until moments before installation.
For proper operation above about 1 Torr, install Mini-Convectron Modules with the gauge axis
horizontal. See Figure 3-1. Although the gauge will read correctly below 1 Torr when mounted in any
position, erroneous readings will result at pressures above 1 Torr if the gauge axis is not horizontal.
Vibration causes convection cooling of the sensor and will result in high pressure readings. Mount
Mini-Convectron Modules where they will not vibrate excessively.
Orient the gauge to prevent condensation of process vapors on the internal surfaces through
line-of-sight access to its interior. If vapor condensation is likely, orient the port downward to help
liquids drain out of the gauge.
Chapter 3