Series 275
Mini-Convectron
®
Vacuum Gauge Module
with DeviceNet
TM
Digital Interface
This Instruction Manual is for use with MKS Series 275
Convectron Modules with DeviceNet, catalog numbers
275420-1-GQ-T-00011and 275420-1-PQ-T-00001.
A list of catalog numbers for replacement gauges (not the
entire module) is provided on the following page.
Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: +1-833-986-1686
Email: [email protected]
Visit our website at www.mksinst.com
Instruction Manual
© 2019 MKS Instruments, Inc. All rights reserved.
Granville-Phillips
®
and Convectron
®
are registered trademarks, and mksinst
TM
is a trademark of
MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of
their respective owners.
Summary of Contents for 275420-1-GQ-T-00011
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Page 26: ...4 Operation 26 Series 275 Convectron Module with DeviceNet Instruction Manual 275502 Notes...
Page 31: ...5 DeviceNet Operation Series 275 Convectron Module with DeviceNet Instruction Manual 275502 31...
Page 32: ...5 DeviceNet Operation 32 Series 275 Convectron Module with DeviceNet Instruction Manual 275502...
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