Index
A
ccessories for connections . . . . . . . . . . . 3
18
Activating the system . . . . . . . . . . . . . . . . 5
27
Addresses . . . . . . . . . . . . . . . . . . . . . . . . 1
10
Antechamber(s) . . . . . . . . . . . . . . . . . . . 12
61
Analyzer(s) . . . . . . . . . . . . . . . . . . . . . . . 15
79
Antechamber operation . . . . . . . . . . . . . 12
61
Automatic antechamber control . . . . . . . 12
67
B
ox gloves . . . . . . . . . . . . . . . . . . . . . . . 15
93
Box parameters . . . . . . . . . . . . . . . . . . . 11
61
Box pressure . . . . . . . . . . . . . . . . . . . . . . 8
39
C
ircular antechambers . . . . . . . . . . . . . . 12
69
Circulation mode . . . . . . . . . . . . . . . . . . . 9
41
Compressor . . . . . . . . . . . . . . . . . . . . . . 15
93
Compressor cooling . . . . . . . . . . . . . . . . 15
93
Connecting the system . . . . . . . . . . . . . . . 4
23
Controlkeys . . . . . . . . . . . . . . . . . . . . . . . . 6
32
D
isplay . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
31
Display areas (Operation Panel) . . . . . . . 11
55
Dust filters . . . . . . . . . . . . . . . . . . . . . . . 14
79
F
oot switch . . . . . . . . . . . . . . . . . . . . . . . . 8
40
G
loves . . . . . . . . . . . . . . . . . . . . . . . . . . 14
86
H
ardkeys . . . . . . . . . . . . . . . . . . . . . . . . . 6
31
L
imit setpoints . . . . . . . . . . . . . . . . . . . . . 8
39
M
BRAUN series, overview . . . . . . . . . . . 1
10
“MBRAUN QuickPurge” automatic
purging system . . . . . . . . . . . . . . . . . . . . . 7
35
Maintenance . . . . . . . . . . . . . . . . . . . . . . 14
91
Message level . . . . . . . . . . . . . . . . . . . . . 11
55
Mini antechambers . . . . . . . . . . . . . . . . . 12
71
Modification of a system . . . . . . . . . . . . . . 2
13
O
P 17 Operation Panel . . . . . . . . . . . . . . 6
29
Operation gases . . . . . . . . . . . . . . . . . . . . 3
17
Operating hours . . . . . . . . . . . . . . . . . . . 11
56
P
arameter set . . . . . . . . . . . . . . . . . . . . . 11
58
Power connection . . . . . . . . . . . . . . . . . . . 3
20
Pressure control . . . . . . . . . . . . . . . . . . . . 8
37
Purge gas . . . . . . . . . . . . . . . . . . . . . . . . . 3
17
7
35
Purging . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
33
Purifier column(s) . . . . . . . . . . . . . . . . . . . 9
44
Term
Chapter Page
Term
Chapter Page
R
egeneration . . . . . . . . . . . . . . . . . . . . . 10
47
Regenerating gas . . . . . . . . . . . . . . . . . . . 3
18
S
afety instructions . . . . . . . . . . . . . . . . . . 4
23
Selection level(s) . . . . . . . . . . . . . . . . . . 11
55
Set mode . . . . . . . . . . . . . . . . . . . . . . . . 11
57
Setting ranges (Operation Panel) . . . . . . 11
56
Site collection for a system . . . . . . . . . . . . 2
13
Softkeys . . . . . . . . . . . . . . . . . . . . . . . . . . 6
31
SPS control components . . . . . . . . . . . . 14
4
Standard operation (antechamber) . . . . . 12
64
Start messages . . . . . . . . . . . . . . . . . . . . 5
27
Status . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
56
Status indicator . . . . . . . . . . . . . . . . . . . . . 6
31
T
ransferring material from the box . . . . . 12
66
Transferring material into the box
(automatic antechamber control) . . . . . . 12
64
Transferring material into the box
(standard operation) . . . . . . . . . . . . . . . . 12
66
Transport of a system . . . . . . . . . . . . . . . . 2
13
V
acuum pump . . . . . . . . . . . . . . . . . . . . 15
93
W
afer antechambers
(Circular antechambers) . . . . . . . . . . . . . 12
69
Water cooling . . . . . . . . . . . . . . . . . . . . . . 3
20
Working gas . . . . . . . . . . . . . . . . . . . . . . . 3
18
Working pressure . . . . . . . . . . . . . . . . . . . 8
39
Working range . . . . . . . . . . . . . . . . . . . . . 8
39
Working setpoints . . . . . . . . . . . . . . . . . . . 8
39
Index
105
Summary of Contents for MB 120B-G
Page 6: ...OPERATING INSTRUCTIONS Chapter 1 General Information MBRAUN 1...
Page 10: ...OPERATING INSTRUCTIONS Chapter 2 Transport Site Selection Modification MBRAUN 2...
Page 13: ......
Page 14: ...OPERATING INSTRUCTIONS Chapter 3 Preparing the Connections MBRAUN 3...
Page 20: ...OPERATING INSTRUCTIONS Chapter 4 Installation MBRAUN 4...
Page 24: ...OPERATING INSTRUCTIONS Chapter 5 Activating and Deactivating the System MBRAUN 5...
Page 28: ...OPERATING INSTRUCTIONS Chapter 6 OP 17 Operation Panel MBRAUN 6...
Page 32: ...OPERATING INSTRUCTIONS Chapter 7 Purging the System MBRAUN 7...
Page 36: ...OPERATING INSTRUCTIONS Chapter 8 Pressure Control System MBRAUN 8...
Page 40: ...OPERATING INSTRUCTIONS Chapter 9 Circulation Mode MBRAUN 9...
Page 45: ......
Page 46: ...OPERATING INSTRUCTIONS Chapter 10 Regeneration MBRAUN 10...
Page 51: ......
Page 52: ...OPERATING INSTRUCTIONS Chapter 11 Settings and Display Patterns MBRAUN 11...
Page 59: ......
Page 60: ...OPERATING INSTRUCTIONS Chapter 12 Antechamber Operation MBRAUN 12...
Page 73: ......
Page 74: ...OPERATING INSTRUCTIONS Chapter 13 Dust Filters MBRAUN 13...
Page 77: ......
Page 78: ...OPERATING INSTRUCTIONS Chapter 14 Analyzers MBRAUN 14...
Page 90: ...OPERATING INSTRUCTIONS Chapter 15 Maintenance and Service MBRAUN 15...
Page 94: ...OPERATING INSTRUCTIONS Chapter 16 Spare Parts List MBRAUN 16...
Page 103: ......
Page 105: ......