6-20 REMOTE/AUTOMATED CONTROL
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
1.
GS1 – Gas Channel 1, xxx.x
2.
GS2 – Gas Channel 2, xxx.x
3.
GS3 – Gas Channel 3, xxx.x
4.
GS4 – Gas Channel 4, xxx.x
5.
DSV – Discharge Voltage Target, xxx.xxx
6.
DSI – Discharge Current Target, xx.xxx
7.
BEI – Filament Emission Current Target, xx.xxx
The (values) for each <parameter> may have decimal points and
decimal places included or omitted if there are no signi
fi
cant digits
beyond the decimal point. However, if the
fi
rst signi
fi
cant digit falls
after a decimal point, then a zero must precede the decimal point or
an “Invalid Command” response will be generated. Decimal places
beyond the anticipated place will be truncated.
Example: P4:GS1 10<cr><lf> - Set program 4 channel 1 gas
fl
ow to 10 sccm.
Example: P1:DSV?<cr><lf> - Get program 1 Discharge voltage
value.
Example response in ‘Terse’ or Verbose mode: “200.000”
●
Set or query the values for ALL program parameters
The parameter <ALL> can be used to set or get all program param-
eter values. The order of the parameters is the same as the order
shown above, as are the signi
fi
cant digits and the decimal point
criteria.
P<program#>:ALL (value),(value),(value)….<cr><lf> – Set ALL pro-
gram parameters to value list.
P<program#>:ALL?<cr><lf> - Get all the program values.
NOTE!! In the following examples, the comma-delimited strings are
shown with their mnemonic equivalents listed above. In real use,
these abbreviations would be actual numerical values. These nu-
merical values must be valid for the con
fi
guration being programmed
remotely since the Auto-Controller does not know the maximum
ranges of the units attached. The target values returned include the
Gas Channels, Discharge voltage, Discharge current, and Filament
Emission current.
