3-4 INSTALLATION
_______________________________________________________________________
Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
3” and “MFC 4” located on the back panel of the Auto Controller. Attach the
other ends of these cables to the corresponding MFC’s.
• The mass
fl
ow controller is de
fi
ned by the ion-source application. The gas
fl
ow controller should be mounted as close as possible to the vacuum
chamber. See the MFC manual.
• There is a two pin interlock connector located on the back of the Auto
Controller. The unit comes supplied with a jumper installed in the interlock
connector. The Auto Controller disables the output of the
fi
lament and dis-
charge power supplies if this contact is open. If a system interlock is used, a
separate isolated contact should be connected to each interlock connector.
• If remote control of the auto controller is used, that cable can be attached at
this time to either the female DB-25 connector, the female DB-37 connec-
tor or the female DB-9 connector. These remote interfaces require knowl-
edge of the ion source operation, which is given in the next two sections
of this manual. The detailed descriptions for remote control are Section 6
REMOTE/AUTOMATED CONTROL of this manual.
• The connections between the pressure regulators and the
fl
ow controller
valves should be made with clean (passivated or hydrocarbon free) stain-
less-steel tubing, with all
fi
ttings properly installed.
Plastic tubing should
not be used to avoid contamination of the gas.
Table 3-3. Pin descriptions for the rear panel DB-15 female MFC output con-
nectors.
Pin
Number
Description
1
Common for 0-5 volt setpoint.
2
0-5 V
fl
ow read back signal from MFC, referenced to pin 10.
3
Not used.
4
Valve off. Connected to common when the setpoint
fl
ow is set to zero or
when the Auto Controller is in Standby, otherwise
fl
oated.
5
+15 V, referenced to pin 9.
6
-15 V, referenced to pin 9.
7
Not used.
8
0-5 V setpoint out to MFC, referenced to pin 1.
9
Power common for ± 15 V.
10
Common for read back signal.
11
Not used.
