INITIAL OPERATION 4-3
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
The emission setpoint can be adjusted by turning the Emission Adjust
knob on the front of the Filament Power Supply. This can only be
independently in the standby mode, but is also adjusted automatically
when adjusting the Discharge current. This maintains the same Emission
to Discharge current ratio. For the initial operation, leave the emission at
the program setpoint.
4.3.1.4 Discharge Parameters
The setpoints for the discharge voltage in volts and the discharge current
in amps are displayed on the front panel of the discharge power supply
in the displays labeled Discharge Volts and Discharge Amps. Notice
that the yellow setpoint LED below the display is on to indicate that the
setpoint is being viewed. Once the Auto Controller is enabled, the run
values will be displayed and the green run LED will be on.
The discharge voltage and current setpoints can be adjusted using the
Setpoint Adjust knob on the front of the discharge controller. These
adjustments can be made when the Auto Controller is in Standby or
Enable. The setpoint being adjusted by the knob is indicated by the
green LED’s on the front panel labeled Amps and Volts. These LED’s are
located above and below the white Select button on the front panel of the
discharge controller. Pressing and releasing the Select button will switch
the parameter being adjusted from Amps (discharge current) to Volts
(discharge voltage) or from Volts to Amps. For the initial operation, leave
the discharge voltage and current at the program setpoints.
4.3.1.5 Enable
Press and release the white Enable/Standby button on the front panel of
the Auto Controller. Notice that the yellow Standby LED under the button
turns off and the green Enable LED above the button turns on. The same
LED transition from Standby to enable also happens on the Filament
Power Supply and the Discharge Power Supply as the Auto Controller
sequences them on. Then the gas
fl
ow will be adjusted until the program
1 parameters are reached.
Note that the operating range of the ion source may be limited by the
vacuum facility pump speed or other process that take place while the
ion source is running.
