REMOTE/AUTOMATED CONTROL 6-7
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Table 6-4. Pin descriptions for the analog outputs on the DB-37 connector.
Pin
number
Description
1
Emission Current Output. 0-5 volts corresponds with 0 to the
maximum emission current in amps for the Filament Power
Supply. Referenced to pin 7 or 8.
2
Filament Current Output. 0-5 volts correspond with 0-25 amps
of
fi
lament heating current for the Filament Power Supply.
Referenced to pin 7 or 8.
6
Filament voltage Output. 0-5 volts corresponds with 0-40 volts
for the Filament Power Supply. Referenced to pin 7 or 8.
7
Common.
8
Common.
9
Channel 1 Gas Flow Output. 0-5 volts corresponds with 0 to
the maximum output in sccm for the channel 1 MFC. Refer-
enced to pin 27.
10
Channel 3 Gas Flow Output. 0-5 volt corresponds with 0 to the
maximum output in sccm for the channel 3 MFC. Referenced
to pin 27.
20
Discharge Current Output. 0-5 volts corresponds with 0 to the
maximum level of discharge current in amps for the Discharge
Power Supply that is being used.
21
Discharge Voltage Output. 0-5 volts corresponds with 0 to the
maximum level of discharge voltage in volts for the Discharge
Power Supply that is being used.
27
Gas
fl
ow Output common.
28
Channel 2 Gas Flow Output. 0-5 volts corresponds with 0 to
the maximum output in sccm for the channel 2 MFC. Refer-
enced to pin 27.
29
Channel 4 Gas Flow Output. 0-5 volts corresponds with 0 to
the maximum output in sccm for the channel 4 MFC. Refer-
enced to pin 27.
6.2.5 Run Fault and Beam Good on the DB-37 Connector
The Run Fault and Beam Good are available for additional monitoring of
the operational state of the auto controller and associated power supplies.
These pins are described below in table 6-5.
