INITIAL OPERATION 4-9
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
• Press the white Enable/Standby button on the Filament Power Sup-
ply.
• Press the white Enable/Standby button on the Discharge Power Sup-
ply.
• Adjust the gas
fl
ow using the Gas Adjust Knob on the Auto Controller
until the discharge current is aproximatey 2.5 A.
• Operate the ion source for at least 10 minutes to clean any contami-
nates from the ion source that may have been introduced while at
atmosphere.
• The discharge current will vary slightly during this time. Adjust the gas
fl
ow after the 10 minutes to obtain a discharge current of approxi-
mately 2.5 A.
• At this point the operating conditions can be saved as a program to
be used later in the Auto Gas mode or the Manual Gas mode. To do
this,
fi
rst press the white Program Select Button repeatedly until the
desired program number is selected as indicated by the numbered
red LED’s. Next press the white Acquire Setpoints button until the red
numbered LED that was selected stops
fl
ashing.
• Put the Discharge and Filament power supplies into Standby in that
order by pressing the white Enable/Standby button on each control-
ler.
• Put the gas
fl
ow into Standby by pressing the white Enable/Standby
button on the auto controller.
Restarting the ion source in the gas only mode consists of, enabling the
Auto Controller, Filament Power Supply and Discharge Power supply
in that order. Slight variations in discharge voltages may be seen while
the source is reaching operating temperature. The variations should be
acceptable for most cleaning or ion-assist applications.
4.3.3 Manual Gas Mode
Manual Gas mode sequentially enables the gas,
fi
lament and discharge in
the same manner that these would be enabled manually if the Gas Only
mode were used. There is no feedback to adjust the gas
fl
ow to maintain
the constant discharge parameters.