JEOL JSM-6390 LA, User Manual

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SEM manual ETHZ v1.4
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I.2) SE, BSE, or CL mosaic imaging
The mosaic imaging is a grid of X * Y individual images stitched together for imaging large
areas (> 2 mm). To do so, you must define a grid in the “Automation” tab (
Fig. 21 ):
1. In Thermo NSS, select the mode “Electron Imaging” .
2. Click on the button “Acquisition properties > [tab] Imaging”. Under the top section
“Averaged Acquisition”, set the image acquisition time (default: 2 frames, 10 s each )
and the image size (recommended: 1024 x 768 ). Ignore the bottom section (“Live…”).
3. Enter a name for your image in the textbox “Base name” .
4. On JEOL SEM program, select the desired electron signal: SEI for secondary
electron, BEIW for backscattered electron (BSE), or BEIC 3 for cathodoluminescence.
NOTE: If you choose the BEIW signal, select also the mode:
– COMPO (most common, compositional effect).
– TOPO (topography ~ similar to SEI but lower quality).
– SHADOW (mix of topography and compositional effect).
5. Move the stage position to the first corner-image of the mosaic image to acquire.
6. Set the magnification (e.g., 70x to 150x for large mosaic images).
7. Adjust the Z-stage position (for SE, BSE images [at fixed WD]) or the focus (for CL
images) to get the clearest and sharpest image possible.
8. Adjust the brightness and contrast ( Fig. 16 ). For CL image, remember to adjust the
brightness and contrast directly on the CL controller box (below the IR camera).
9. In Thermo NSS tab “Analysis Automation” (below the image), define the mosaic
image to be acquired:
a. Select “Grid” under the “Stage Movement”.
b. Click on the button “ ” to add a new grid. It opens a frame with options:
i. Enter a name for this grid. The final name of each image of the mosaic
will be “Base Name[Grid Name@ 0 0]”, where “0 0” is the image
coordinate as “row & column” starting from the lower-left corner-image.
ii. Store this “FIRST” position by clicking the button “ ”.
iii. Move the stage to the other corner of your mosaic image.
iv. Store the “LAST” position by clicking again on “ ”.
v. Notice that the “Frame Layouts” field in the “Analysis Automation” tab
is available (not greyed out). You can adjust the overlay between
images. A minimum of 5 to 15% overlay is recommended to avoid
“black squares” in your final mosaic image (= areas not imaged).
vi. Click “OK” to validate your choice for this grid.
10. A grid is now defined in the list of “Analysis Automation”. If you need to modify it,
select the entry in the list and click .
WARNINGS!!!
a. DO NOT check the box “Beam OFF”!
b. DO NOT set a second mosaic grid (software bug). Only one grid at a time!
11. In the bottom section of the tab, press the blue button “play” to test your mosaic
image . The stage will move in position for the first image (bottom-left corner) and will
calculate the number of frames required (it might differ from the initial calculation).
12. Click again the blue play button to move to the next image. You don’t need to check
all images of your mosaic, just the first 2 or 3 images to ensure a good overlapping…
13. If it looks all good, abort the test (barred red play button) and press the dark button
“play” to start the acquisition of your mosaic image.
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BEIC requires first that you insert and activate the CL detector! Refer to Section G.1 for details.