SEM manual ETHZ v1.4
29
I) SE, BSE, or CL imaging with Thermo NSS
In the following, it is assumed that…
•
The “Thermo NSS” program is running.
•
You have created an NSS project folder or opened an existing one (see
Section H.1
).
I.1) SE, BSE, or CL imaging
To acquire a single SE, BSE, or CL image (see also
Fig. 20
):
1. In Thermo NSS, select the mode “
Electron Imaging
”.
2. Click on the button “Acquisition properties”
and select the tab “Imaging”. Under
“Averaged Acquisition”, set the image acquisition time (default:
2 frames, 10 s each
)
and the image size (recommended:
1024 x 768
). Ignore the bottom section “Live…”.
3. Enter a
name for your image
in the textbox
“Base name”
.
4. Adjust the
signal & field-of-view on the JEOL SEM program
:
•
Select the desired electron signal:
SEI
for secondary electron,
BEIW
for
backscattered electron (BSE), or
BEIC
2
for cathodoluminescence.
NOTE: If you choose the BEIW signal, select also the mode:
–
COMPO
(most common, compositional effect).
–
TOPO
(topography ~ similar to SEI but lower quality).
–
SHADOW
(mix of topography and compositional effect).
•
Adjust the stage position and set the magnification to the desired field of view.
Avoid low magnification (< 100x) as you will have edge effects (shadow &
deformation).
•
Adjust the Z-stage position (for SE, BSE images at fixed WD) or the focus (for CL
images) to get the sharpest image possible.
•
Adjust the brightness and contrast (
Fig. 16
). For CL image, remember to adjust
the brightness and contrast directly on the CL controller box (below the IR
camera;
Fig. 17b
).
5. Back to Thermo NSS, click on the button “Acquire averaged electron image” to
start the acquisition.
6. The image is automatically stored at the end of the acquisition, and an entry will be
created under the field “Base Name”. You can then at any time click on one of the
saved images to select and display it. Image information (including stage coordinate)
are found in the top-right panel with two tabs: (a) pixel & frame, (b) column & stage.
7. Continue with the acquisition of the next image: move the stage in position, adjust
the brightness & contrast if necessary, change the “Base Name” and click again
“acquire averaged electron image”, etc.
8. At the
end
of your session, don’t forget to reserve time to
export your images
(see
Section I.3
). This can take a while if you have 50+ images.
2
BEIC requires first that you insert and activate the CL detector! Refer to
Section G.1
for details.
Summary of Contents for JSM-6390 LA
Page 2: ......
Page 14: ...10 J M Allaz March 14 2021 Figure 10 Opening the sample chamber to remove or place a sample...
Page 18: ...14 J M Allaz March 14 2021 Page left blank intentionally a good place for your notes J...
Page 23: ...SEM manual ETHZ v1 4 19 Figure 13 Complete procedure for beam alignment...
Page 30: ...26 J M Allaz March 14 2021 Figure 18 Creating a new NSS project or opening an existing one...
Page 32: ...28 J M Allaz March 14 2021 Page left blank intentionally a good place for your notes J...
Page 38: ...34 J M Allaz March 14 2021 Page left blank intentionally a good place for your notes J...
Page 48: ...44 J M Allaz March 14 2021 Page left blank intentionally a good place for your notes J...
Page 52: ...48 J M Allaz March 14 2021 Figure 27 Processing and extracting element maps...
Page 53: ...SEM manual ETHZ v1 4 49 Figure 28 Calculating and extracting phase maps...
Page 62: ...58 J M Allaz March 14 2021 A6 Thermo NSS toolbars from the NSS manual...
