Maintenance works
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9.5.3
8000 hours maintenance
The 8000 hours maintenance should be performed by an INFICON service tech-
nician or an other authorized person.
The scroll module of the scroll pump IWATA should be replaced every 8000 working
hours, at least every 2 years.
After 8000 working hours, the „Tip Seal“ of the scroll module of the Varian pump
should be replaced by an INFICON service technician. If the „Tip Seal“ has not been
replaced, then after 12000 working hours the scroll module must be exchanged.
The maintenance work will take approximately 6.0 hours.
Work to be performed
Required materials
P/N
Exchange the scroll module (IWATA ISP-
500B)
•
Scroll module for IWATA ISP-500B
200000217R
Replace the Tip Seal (Varian TS 620)
•
Tip Seal
2000001671
Restore the Lubricant Reservoir TMH 071 •
Lubricant Reservoir for TMH 071
200000577
Replace the seals for valves
•
Set of seals for valves
200000594
Check and/or replace Filters
•
Spare Filter Cell for the fans
•
Spare Filter for venting and purge line
•
Silencer for exhaust
200000685
200000683
20099183
Functional check and adjustement
