Error And Warning Messages
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40
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E47
Emission for both cathodes
can not be switched on!
Signal MSIBE on MSV board is not active. Emission can not be switched
on. Exchange the cathode by changing the ion source. After having
exchanged the ion source it must be possible to switch on both cathodes
manually via the service menu.
E48
Anode heater is faulty!
Signal MSAFD on MSV board is active. Anode heater fuse has blown.
Replace fuse F2 on the MSV board.
E50
No communication with turbo
pump
Clock from the frequency converter has failed. No communication to the
frequency converter.
E52
TMP frequency is too low!
•
TMP frequency is too low!
•
Frequency converter is faulty.
•
Turbomolecular pump is faulty.
W53 Temperature at electronic
unit is too high (>55°C)
•
Ambient temperature too high.
•
Ventilation failure.
•
Air filter dirty and have to be changed.
E
54 Temperature at electronic
unit is too high (>60°C)
•
Ambient temperature is too high.
•
Internal ventilation has failed.
•
Air filters are dirty and must be exchanged.
W55 Temperature at electronic
unit is too low (< 2°C)
•
The temperature sensor on the wiring plane indicates T < 2 °C. Run-up
time for the forevacuum pump will be longer.
•
Temperature sensor is faulty.
E56
Inlet pressure p1 too low!
U < 0,27 V; Pressure sensor faulty.
Change thermovac-sensor that measures p1.
E58
Foreline pressure p2 too low! U < 0,27 V; Pressure sensor faulty.
Change thermovac-sensor that measures p2.
E60
p2>10mbar after 5 minutes
since power on
PV > 3.8 mbar after t > 5 minutes since switching on. Run-up time of the
forevacuum pump is too long.
•
Forepump is faulty.
•
Valve V2 does not open.
E61
Emission fail
Emission should be switched on. MSV subassembly indicates a fault.
MENB emission current not within range.
W62 Flow through capillary to low In the sniffer mode the intake pressure of the sniffer line is controlled. If the
pressure falls below the minimum limit, the flow through the capillary is too
low (contamination) or the capillary is blocked (foreign objects, particles).
The minimum limit can be set by the menu. Default value is 0.1 mbar. See
Chapter
W63 Capillary broken
In the sniffer mode the intake pressure of the sniffer line is controlled. If the
pressure exceeds the maximum limit, the flow through the capillary is too
high (no leak tightness, broken capillary).
The maximum limit can be set by the menu. Default value is 1.0 mbar. See
Chapter
W65 Booster-TMP failure!
"Frequency converter is faulty",
"Booster-TMP is faulty",
No.
Displayed Message
Description and possible solutions
