tinb21e1 (2016-06)
37
attempting to increase the reading up to 760 Torr, you will over
pressurize your chamber which may present a hazard.
Example C: If the gas is helium (He), the gauge will over pres-
sure (OP) when pressure reaches about 10 Torr true pressure
and opening the chamber to atmosphere prematurely may pre-
sent other hazards for both people and product.
CAUTION!
What these examples illustrate is that using gases
other than nitrogen (N
2
) without using accurate gas conversion
data and other proper precautions could result in injury to per-
sonnel and/or damage to equipment.
Suggested precautions when using gases other than
nitrogen (N
2
):
Install a pressure relief valve or burst disk on your chamber, to
protect it from overpressure. Post a warning label on your gauge
readout that states "Do Not Exceed ____ Torr Indicated Pres-
sure" (fill in the blank for maximum indicated pressure for the gas
you use) so that an operator using the gauge will not exceed a
safe pressure.
6 Display
6.1
Display - Torr / mTorr
Displayed pressure readings vs. true pressure for selected
gases - engineering units in Torr / mTorr (see following table):
Pressure shown in bold italic font in the shaded areas are in
mTorr.
Pressure shown in normal font in non shaded areas are in Torr.
Summary of Contents for PGE500
Page 83: ...tinb21e1 2016 06 83 Notes...
