tinb21e
2.3.2
2.4
1 (2016-06)
WARNIN
shock and bod
potential high v
vacuum system
Electrical Int
It is the user’s
from this produ
for example, re
Always double
to automate yo
sis of your syst
safety measure
age.
Overpressu
WARNIN
limit the level o
than what the v
of withstanding
sures exceedin
In cases where
condition, alwa
ample, use a p
eration where a
sures if the pre
chamber.
NG!
In order to p
ily harm, shield al
voltage electrical d
m.
terface and Co
responsibility to e
uct and any conne
elays and solenoid
check the system
our process. Perfo
tem design and en
es are taken to pre
ure and use w
NG!
Install suitab
of pressure inside
vacuum chamber
g. INFICON gauge
ng 1000 Torr abso
e an equipment fa
ays implement fail-
pressure relief dev
a malfunction cou
essure relief devic
rotect personnel f
ll conductors whic
discharges in or a
ontrol
ensure that the ele
ections made to ex
ds, are used in a s
m set-up before us
orm a hazardous o
nsure safeguards
event injury and p
with hazardo
ble protective devic
your vacuum cha
system compone
es should not be u
olute pressure.
ailure could cause
-safe system oper
vice in an automat
ld result in high in
e was not installe
17
from electric
ch are subject to
round the
ectrical signals
xternal devices,
safe manner.
sing any signals
operation analy-
and personnel
property dam-
us gases
ces that will
mber to less
nts are capable
used at pres-
a hazardous
ration. For ex-
tic backfill op-
nternal pres-
d on the
Summary of Contents for PGE500
Page 83: ...tinb21e1 2016 06 83 Notes...
