tinb21e1 (2016-06)
49
For Non-Linear Analog Output voltage range of
4.94 to
5.659 volts
, use this table.
Coefficients for
=
a 100.624
b -0.37679
c -20.5623
d 0.0348656
Where y(x) = pressure in Torr,
x= measured analog output in volts
Example: Measured analog output voltage is 0.3840 V.
From first table shown above use equation:
y(x) = a + bx + cx
2
+ dx
3
+ ex
4
+fx
5
x = 0.3840 volts
a = -0.02585, b=0.03767, c=0.04563, d=0.1151,
e=-0.04158, f=0.008738
y(x) = Pressure = 1.0E-03 Torr
The equations listed above are used to calculate the non-linear
voltage outputs for N
2
/air shown in the table below. Non-linear
voltage outputs for various other gases are also shown in the
same table.
Non-Linear analog output for selected gases - Engineering units
in Torr / mTorr (see following table):
Summary of Contents for PGE500
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