Inficon PGE500, Operating Manual

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54
tinb21e1 (2016-06)
CH
4
0.375 0.376 0.378
0.3825 0.3896
0.403 0.438 0.492 0.584 0.796 1.053
(con
tinued)
Ne
0.375 0.376
0.3763 0.3782
0.381 0.388 0.405 0.433 0.484 0.608 0.768
D
2
0.375 0.376 0.377 0.381 0.386 0.396 0.425
0.47
0.549 0.727 0.944
Freon
22
0.375 0.376 0.378 0.381 0.388
0.4
0.432
0.48
0.566 0.764
0.99
Freon
12
0.375 0.376 0.378 0.382 0.388 0.401 0.437 0.488 0.581 0.778 1.009
KR
0.375 0.376 0.377 0.381 0.379 0.384 0.395 0.415 0.451 0.544 0.668
CO
2
0.375 0.376 0.377 0.381 0.385 0.395 0.412 0.462 0.536 0.705
0.9
O
2
0.375 0.376 0.377
0.38
0.384 0.392 0.417 0.453 0.521 0.679 0.868
He
0.375 0.376 0.377 0.379 0.382 0.389 0.409 0.441 0.497 0.637 0.814
Ar
0.375
0.3757
0.376 0.378 0.381 0.387 0.403 0.429 0.477 0.595 0.745
N
2
0.3751 0.3759 0.3768 0.3795
0.384
0.3927 0.4174 0.4555 0.5226 0.6819
0.878
True Pre
ssure
[mbar]
0
.0001 .0003 .0006 .0013 .0027 .0067 .0133 .0266 .0660
0.13