6 - 4
6.3 Spare Parts
The spare parts shown below must be obtained when the system is operated for a long time.
The number of spare parts you need to stock differs depending on your usage. (See Table
6.3.)
Table 6.3 Spare Parts
Part No.
Name
Remarks
Quantity
Used
J821153
Fuse
For maintenance (0.3 A)
2
J821154
Fuse
For maintenance (0.5 A)
2
J821156
Fuse
For maintenance (1.6 A)
2
J821157
Fuse
For maintenance (2 A)
2
J821158
Fuse
For maintenance (3.2 A)
2
J821159
Fuse
For maintenance (5 A)
2
J821591
Alarm Fuse
For maintenance (2 A)
2
J821594
Alarm Fuse
For maintenance (5 A)
2
J821055
Fuse
For maintenance (6.3 A)
2
55E-1392 Specimen
stage
∅
70 mm
-
55E-1682 Specimen
stage
∅
30 mm
-
L456819 O-ring
For
electron
gun
1
L456111
O-ring
For inner pipe
1
L456850
O-ring
For specimen chamber port (front)
1
L456824
O-ring
For specimen chamber port (side)
1
Summary of Contents for TM3000
Page 272: ...CE 2 ...