1.3 Specifications
Table 1.3 Specifications
Item Product
Specifications
1 Accelerating voltage
5 kV, 15 kV
2
Magnification
15 to 30000x (image display magnification: number of
steps: 40 (
※
1) )
(digital zoom 2x, 4x), max. observation range: 3.5 mm on
an edge
The minimum magnification depends on the accelerating
voltage, D (
※
2), and the screen size.
3 Maximum specimen size 70 mm (diameter)
4
Maximum specimen
thickness
50 mm
5 Specimen stage
X
：
35 mm, Y
：
35 mm (X, Y only)
6 Electron gun
Pre-centered cartridge filament
7 Stigma correction coil
Provided
8 Image shift
±50
μ
m (15 kV mode: D=4.5 mm)
9
Detector
High-sensitivity semiconductor backscattered electron
detector
10 Control CPU method
Notebook PC + dedicated microcomputer control
11 Monitor (recommended) LCD attached to the notebook PC (15.4-inch)
12 Image data recording
Hard disk mounted on PC, and other recording media
13 Recording pixels
1280×960 pixels (max.) /640×480 pixels
14 Data display
Micron marker, file No., date, comments
15 Automated function
Auto luminosity control, auto focusing adjustment
16
Auxiliary operation
function
Raster rotation
Magnification preset (2 steps)
17
Vacuum pump
Compact turbo molecular pump: 30 l/s
Diaphragm pump: 1 m
3
/h
18 Vacuum detector
Pirani gauge
19 Frequency
50/60 Hz
20
Main unit power supply
AC 100 to 240 V (Min. 90 V, Max. 250 V), 500 VA
Built-in earth leakage breaker (5 A/(15 mA)): 3P outlet
connection
21
Dimensions/weight
Main unit:
330×606×550 63 kg (manual stage)
330×630×550 66 kg (motor drive stage)
Diaphragm pump: 145×256×217 4.5 kg
(
※
1) Magnification steps
×
15 18 20 25 30 40 50 60 80 100 120 150 180 200 250 300 400 500 600 800 1000
1200 1500 1800 2000 2500 3000 4000 5000 6000 7000 8000 9000 10000 12000
15000 18000 20000 25000 30000
(
※
2) [D] denotes the distance between the specimen surface and the detector.
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Summary of Contents for TM3000
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