56
HE 5750 Operating Instructions
#371627 Version 1.1
Parameter
Description
15.1 Chamber division
The cleaning with chamber division can be weighted differently within a
chamber.
0 = switches functioning of cleaning factors off.
1 = chambers are not divided
2 = chambers are divided in 2 parts. RF1 and RF2 are for chamber 1
15.2 Cleaning factor 1
RF1 for chamber 1 division 1
15.3 Cleaning factor 2
RF2, the assignment depends on the selected chamber division.
…
15.4 Cleaning factor 48
RF48, the last max. possible cleaning factor.
Cleaning factors that are not required are ignored.
Operating modes of cleaning systems:
Permanent cleaning: Time-controlled cleaning
Delta-p cleaning: upper threshold starts, lower threshold stops
the cleaning process
Flow rate controller: Flow rate-dependent
differential pressure regulation by pause time
variation.
16 Pre-pressure control valve
See chapter
16.1 Type of control
0 (Off):
no control of cleaning pressure
1 (Delta-p):
The control is based on the support curve of the cleaning
nominal pressure, which specifies the nominal pressure in relation to the
current differential pressure. In addition, the differential pressure can be
corrected via the filter resistance.
2 (flow rate):
The control is based on the support curve of the cleaning
nominal pressure, which specifies the nominal pressure in relation to the
current flow rate.
3 (external nominal value):
The nominal value is set via the process
level interface as process data pool ‘PDP external pre-pressure nominal
value’. If the process level is not active or the local control is activated,
this nominal value is automatically set to the pressure measuring range
end value.
16.2 Type of valve
Using the control output for the central isolation valve (HE 5750 digital
output DO7).
0 (NC):
Isolation valve “normally closed”, isolation valve opens as soon
as control voltage is applied.
1 (NO):
Isolation valve
“normally open”, isolation valve closes as soon as
control voltage is applied.
2 (control valve):
when using an external pressure control valve, which
is triggered by a standard signal. The pre-pressure control is then not
carried out via the central isolation valve.
16.3 Pressure control valve
Max. output pressure for scaling the standard signal. Scaling is done for
a 4...20mA output signal (0…16000 µA). For other scaling, the
workspace must be converted accordingly.
16.4 Filter resistance 20%
Setting the natural filter resistance for 20% flow rate.
To set the resistance, a flow rate signal must be available.
16.5 Filter resistance 80%
Setting the natural filter resistance for 80% flow rate. To set the
resistance, a flow rate signal must be available.
