FINEPLACER
®
lambda
Rev-Nr. 1.1
35
Repeat the placement and check the placement accuracy.
If you are still out of specification, repeat the steps.
Available Adjustment Set
AJ3.P2 Adjustment Set, 1 µm for placement arm with fine rotation
4.3
Adjusting the Placement Arm's Coplanarity
1.
Clamp the adjustment plate into the positioning table (steel plate).
2.
Use maximum magnification and put the adjustment plate into the focal point
(use z micrometer screw at positioning table).
3.
Slide optics into swivel position and switch off the system.
4.
Remove the 25 pin connector at the back of the swivel module (allows you to
move the placement arm manually).
5.
Put the placement arm into the horizontal position and clamp in the four leg
parallelism adjustment tool.
Never try to move the arm back to his vertical position as long as the
four leg tool is in place!
Top: Optimal alignment in x direction
Right: Optimal alignment in y direction
