4: Data Files – Measurement / Validation
43
The header portion contains information that was entered in the ‘Measurement/Validation
Information’ portion of the display for the particular test, along with other useful information
determined during the test. The header portion of the data file(s) consists of:
Measurement Data File Validation Data File
•
Date/Time Date/Time
•
Type
(Measurement)
Operator
•
Tube Name Expected Thickness 1
•
Operator Expected Thickness 2
•
Tube SN
(Serial Number)
Measured Thickness 1
•
Description Measured Thickness 2
•
Sample Information
•
Other Information
•
Tube Material
•
Test Status
•
ni
(refractive index of the air)
•
ns
(refractive index of the tube)
•
ks
(extinction coefficient of the tube)
•
nf
(refractive index of the deposit)
•
kf
(extinction coefficient of the deposit)
•
DC Offset
(offset of the photo diode in the dark)
•
Lab Name
•
City
•
State
•
Country
•
Ellipsometer SN
(Serial Number)
•
Total Volume
•
Max Ave Thickness
•
Normalization Value
•
Normalization Position
•
Indexing Path
•
Calibration Date
The data table portion of the measurement data file consists of thickness data for each slice and
position (
as defined in the test configuration
). For an ASTM D3241 test, the 24 slices will be from 0 -
360
⁰
(
increments of 15
⁰
) and the position (55 points) will be from 5 – 55 mm (
increments of 1 mm
).
Refer to Addendum ‘B’ for a partial sample of a data file.
The data table portion of the validation data file consists of Power for Wafer 1 & 2 for Angles [deg]
from 0⁰ thru 360⁰
.
Note:
Slice 0⁰ and 360⁰ represent
the same slice.